Inventor · disambiguated record
Tadashi Obikane
Also filed as: OBIKANE TADASHI
17 granted patents·2 pending applications·728 citations·filing 1990–2021
94Inventor score
Top patents by PatentIndex Score
19 records- 0196US8267633B2FOUP opening/closing device and probe apparatusOBIKANE TADASHI·Filed 2009·Granted Sep 18, 2012·500 cites·19 claims
- 0291US5828225ASemiconductor wafer probing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Oct 27, 1998·111 cites·21 claims
- 0388US7701236B2Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a waferTOKYO ELECTRON LTD·Filed 2008·Granted Apr 20, 2010·16 cites·17 claims
- 0482US6830651B2Load port capable of coping with different types of cassette containing substrates to be processedTOKYO ELECTRON LTD·Filed 2002·Granted Dec 14, 2004·30 cites·4 claims
- 0581US7583096B2Probing apparatus and probing methodTOKYO ELECTRON LTD·Filed 2007·Granted Sep 1, 2009·6 cites·11 claims
- 0675US6441630B1Probing apparatus and head plate opening/closing force-reducing mechanismTOKYO ELECTRON LTD·Filed 2000·Granted Aug 27, 2002·18 cites·20 claims
- 0765US7887280B2Processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Feb 15, 2011·2 cites·23 claims
- 0863US8905700B2Transfer and inspection devices of object to be inspectedOBIKANE TADASHI·Filed 2008·Granted Dec 9, 2014·2 cites·16 claims
- 0960US12106997B2Test device, change kit, and method of exchanging change kitTOKYO ELECTRON LTD·Filed 2021·Granted Oct 1, 2024·0 cites·8 claims
- 1059US8726748B2Probe apparatus and substrate transfer methodOBIKANE TADASHI·Filed 2010·Granted May 20, 2014·1 cites·9 claims
- 1159US7741837B2Probe apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Jun 22, 2010·3 cites·4 claims
- 1256US4950982AElectric probing test machineTOKYO ELECTRON LTD·Filed 1990·Granted Aug 21, 1990·18 cites·3 claims
- 1350US8310261B2Probing apparatus and probing methodHOSAKA HIROKI·Filed 2009·Granted Nov 13, 2012·0 cites·20 claims
- 1450US2022172964A1Substrate delivery method and substrate delivery deviceTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1547USD592230SWafer carrying-in/out machineTOKYO ELECTRON LTD·Filed 2007·Granted May 12, 2009·6 cites·1 claims
- 1645US5086270AProbe apparatusTOKYO ELECTRON LTD·Filed 1990·Granted Feb 4, 1992·12 cites·8 claims
- 1739USD607424SWafer carrying-in/out apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jan 5, 2010·3 cites·1 claims
- 1838US2019189482A1Transfer device, transfer method, and inspection systemTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1930USD602882SWafer carrying-in/out apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Oct 27, 2009·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →