USD607424SExpiredUtility

Wafer carrying-in/out apparatus

39
Assignee: TOKYO ELECTRON LTDPriority: Mar 30, 2006Filed: Oct 2, 2006Granted: Jan 5, 2010
Est. expiryMar 30, 2026(expired)· nominal 20-yr term from priority
Inventors:Hiroki HosakaShuji AkiyamaTadashi Obikane
39
PatentIndex Score
3
Cited by
15
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a wafer carrying-in/out apparatus or the like, as shown and described.

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