USD602882SExpiredUtility

Wafer carrying-in/out apparatus

Assignee: TOKYO ELECTRON LTDPriority: Mar 30, 2006Filed: Aug 4, 2008Granted: Oct 27, 2009
Est. expiryMar 30, 2026(expired)· nominal 20-yr term from priority
30
PatentIndex Score
0
Cited by
14
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a wafer carrying-in/out apparatus or the like, as shown and described.

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