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Wafer attracting plate

97
Assignee: TOKYO ELECTRON LTDPriority: Jul 22, 2008Filed: Jan 22, 2009Granted: Feb 9, 2010
Est. expiryJul 22, 2028(~2 yrs left)· nominal 20-yr term from priority
Inventors:Munetoshi NagasakaIkuo OgasawaraEiichi Shinohara
97
PatentIndex Score
567
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8
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for wafer attracting plate, as shown and described.

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