USD612879SExpiredUtility

Semiconductor wafer inspection apparatus

32
Assignee: TOKYO ELECTRON LTDPriority: Oct 18, 1920Filed: Apr 4, 2006Granted: Mar 30, 2010
Est. expiryOct 18, 1940(expired)· nominal 20-yr term from priority
Inventors:Munetoshi Nagasaka
32
PatentIndex Score
1
Cited by
4
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a semiconductor wafer inspection apparatus, as shown and described.

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