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Boat of substrate processing apparatus

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Assignee: HITACHI INT ELECTRIC INCPriority: Dec 27, 2012Filed: Jun 26, 2013Granted: Jul 21, 2015
Est. expiryDec 27, 2032(~6.5 yrs left)· nominal 20-yr term from priority
Inventors:Hidenari YoshidaTomoshi Taniyama
75
PatentIndex Score
19
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36
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1
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Claims

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CLAIM 
     
       The ornamental design for a boat of substrate processing apparatus, as shown.

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