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Boat for substrate processing apparatus

78
Assignee: HITACHI INT ELECTRIC INCPriority: Jul 29, 2013Filed: Jan 27, 2014Granted: Sep 8, 2015
Est. expiryJul 29, 2033(~7 yrs left)· nominal 20-yr term from priority
Inventors:Hidenari YoshidaTomoshi Taniyama
78
PatentIndex Score
21
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29
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1
Claims

Claims

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CLAIM 
     
       The ornamental design for a boat for substrate processing apparatus, as shown and described.

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