USD741823SActiveUtility

Vaporizer for substrate processing apparatus

90
Assignee: HITACHI INT ELECTRIC INCPriority: Jul 10, 2013Filed: Jan 9, 2014Granted: Oct 27, 2015
Est. expiryJul 10, 2033(~7 yrs left)· nominal 20-yr term from priority
Inventors:Hideto TatenoDaisuke HaraMasahisa OkunoTakuya Joda
90
PatentIndex Score
49
Cited by
26
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a vaporizer for substrate processing apparatus, as shown and described.

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