Inventor · disambiguated record
Masahisa Okuno
Also filed as: OKUNO MASAHISA
10 granted patents·3 pending applications·65 citations·filing 2011–2019
85Inventor score
Technology areasH10P
Files withHITACHI INT ELECTRIC INC7AKAO TOKUNOBU2KOKUSAI ELECTRIC CORP2OGAWA UNRYU1YAMAMOTO KATSUHIKO1
Top patents by PatentIndex Score
13 records- 0190USD741823SVaporizer for substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2014·Granted Oct 27, 2015·49 cites·1 claims
- 0280US8866271B2Semiconductor device manufacturing method, substrate processing apparatus and semiconductor deviceYAMAMOTO KATSUHIKO·Filed 2011·Granted Oct 21, 2014·5 cites·9 claims
- 0375US9793112B2Method of manufacturing semiconductor device and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2016·Granted Oct 17, 2017·2 cites·11 claims
- 0470US8486222B2Substrate processing apparatus and method of manufacturing a semiconductor deviceAKAO TOKUNOBU·Filed 2011·Granted Jul 16, 2013·3 cites·9 claims
- 0569US12087598B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2018·Granted Sep 10, 2024·1 cites·17 claims
- 0662US9646862B2Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted May 9, 2017·1 cites·15 claims
- 0759US8987645B2Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the sameOGAWA UNRYU·Filed 2011·Granted Mar 24, 2015·2 cites·4 claims
- 0858US9502239B2Substrate processing method, substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted Nov 22, 2016·1 cites·5 claims
- 0958US8557720B2Substrate processing apparatus and method of manufacturing a semiconductor deviceAKAO TOKUNOBU·Filed 2011·Granted Oct 15, 2013·1 cites·12 claims
- 1050US11168396B2Method of manufacturing semiconductor device and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Nov 9, 2021·0 cites·13 claims
- 1140US2019003047A1Vaporizer and Substrate Processing ApparatusKOKUSAI ELECTRIC CORP·Filed 2018·Application pending·0 cites
- 1236US2011233198A1Substrate processing apparatus and substrate processing methodHITACHI INT ELECTRIC INC·Filed 2011·Application pending·0 cites
- 1333US2016013053A1Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording MediumHITACHI INT ELECTRIC INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →