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Electrostatic chuck for semiconductor manufacturing equipment

99
Assignee: TOKYO ELECTRON LTDPriority: Aug 6, 2015Filed: Feb 1, 2016Granted: Nov 14, 2017
Est. expiryAug 6, 2035(~9.1 yrs left)· nominal 20-yr term from priority
Inventors:Yasuharu SasakiTomoyuki Takahashi
99
PatentIndex Score
280
Cited by
39
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an electrostatic chuck for semiconductor manufacturing equipment, as shown and described.

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