USD803802SActiveUtility

Electrostatic chuck for semiconductor manufacturing equipment

Assignee: TOKYO ELECTRON LTDPriority: Aug 18, 2015Filed: Feb 1, 2016Granted: Nov 28, 2017

Est. expiryAug 18, 2035(~9.1 yrs left)· nominal 20-yr term from priority

PatentIndex Score

285

Cited by

References

Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for an electrostatic chuck for semiconductor manufacturing equipment, as shown and described.

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