USD813181SActiveUtility

Cover of seal cap for reaction chamber of semiconductor

88
Assignee: HITACHI INT ELECTRIC INCPriority: Jul 26, 2016Filed: Jan 25, 2017Granted: Mar 20, 2018
Est. expiryJul 26, 2036(~10 yrs left)· nominal 20-yr term from priority
Inventors:Yusaku OkajimaShuhei SaidoMika Urushihara
88
PatentIndex Score
41
Cited by
14
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a cover of seal cap for reaction chamber of semiconductor, as shown and described.

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