USD981972SActiveUtility

Adiabatic plate for substrate processing appratus

66
Assignee: KOKUSAI ELECTRIC CORPPriority: Mar 22, 2021Filed: Sep 21, 2021Granted: Mar 28, 2023
Est. expiryMar 22, 2041(~14.7 yrs left)· nominal 20-yr term from priority
Inventors:Shinya MoritaSeiyo NakashimaSatoru Murata
66
PatentIndex Score
3
Cited by
9
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an adiabatic plate for substrate processing appratus, as shown and described.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.