USD982537SActiveUtility

Separator of substrate processing apparatus

Assignee: KOKUSAI ELECTRIC CORPPriority: Mar 15, 2021Filed: Sep 14, 2021Granted: Apr 4, 2023
Est. expiryMar 15, 2041(~14.7 yrs left)· nominal 20-yr term from priority
50
PatentIndex Score
1
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a separator of substrate processing apparatus, as shown and described.

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