Method for improving hot carrier lifetime via a nitrogen implantation procedure performed before or after a Teos liner deposition

Abstract

A process for fabricating input/output, N channel, (I/O NMOS) devices, featuring an ion implanted nitrogen region, used to reduce hot carrier electron, (HEC), injection, has been developed. The process features implanting a nitorgen region, at the interface of an overlying silicon oxide layer, and an underlying lightly doped source/drain, (LDD), region. The implantation procedure can either be performed prior to, or after, the deposition of a silicon oxide liner layer, in both cases resulting in a desired nitrogen pile-up at the oxide-LDD interface, as well as resulting, in a more graded LDD profile. An increase in the time to fail, in regards to HCE injection, for these I/O NMOS devices, is realized, when compared to counterparts fabricated without the nitrogen implantation procedure.

1. A method of fabricating a metal oxide semiconductor field effect transistor, (MOSFET), device, on a semiconductor substrate, comprising the steps of:
 forming a gate structure, overlying a gate insulator layer, on said semiconductor substrate;  
 growing a first silicon oxide layer on said gate structure, and on the top surface of regions of said semiconductor substrate not covered by said gate structure;  
 performing a first ion implantation procedure to form a lightly doped source/drain, (LDD), region, in an area of said semiconductor substrate not covered by said gate structure;  
 depositing a second silicon oxide layer;  
 performing a second ion implantation procedure to create a nitrogen region at the first silicon oxide-LDD interface;  
 forming composite insulator spacers on the sides of said gate structure;  
 performing a third ion implantation procedure to form a heavily doped source/drain region in an area of said semiconductor substrate not covered by said gate structure, or by said composite insulator spacers; and  
 performing an anneal procedure.  
 
     
     
       2. The method of  claim 1 , wherein said MOSFET device is an input/output N channel, (I/O NMOS), device. 
     
     
       3. The method of  claim 1 , wherein said gate insulator layer is a silicon dioxide layer, thermally grown to a thickness between about 40 to 80 Angstroms, at a temperature between about 650 to 900° C., in an oxygen-steam ambient. 
     
     
       4. The method of  claim 1 , wherein said gate structure is a polysilicon gate structure, comprised from a polysilicon layer which is obtained via LPCVD procedures, at a thickness between about 1500 to 2500 Angstroms, and either doped in situ, during deposition, via the addition of arsine, or phosphine, to a silane ambient, or deposited intrinsically then doped via implantation of arsenic, or phosphorous ions. 
     
     
       5. The method of  claim 1 , wherein said gate structure is defined via an anisotropic RIE procedure, applied to a polysilicon layer, using Cl 2  or SF 6  as an etchant. 
     
     
       6. The method of  claim 1 , wherein said first silicon oxide layer is thermally grown to a thickness between about 15 to 80 Angstroms, at a temperature between about 800 to 1015° C., in an oxygen-steam ambient. 
     
     
       7. The method of  claim 1 , wherein said first ion implantation procedure, used to form said LDD region, is performed using arsenic or phosphorous ions, at an energy between about 20 to 50 KeV, at a dose between about 2E13 to 5E13 atoms/cm 2 . 
     
     
       8. The method of  claim 1 , wherein said second silicon oxide layer, is obtained via LPCVD or PECVD procedures, at a thickness between about 80 to 250 Angstroms, using tetraethylorthosilicate, (TEOS), as a source. 
     
     
       9. The method of  claim 1 , wherein said second ion implantation procedure, used to create said nitrogen region, is performed using either nitrogen, N 2   + ), or nitrogen ions, (N + ), as a source, at an energy between about 5 to 25 KeV, at a dose between about 1E14 to 1E15 atoms/cm 2 . 
     
     
       10. The method of  claim 1 , wherein said composite insulator spacers are comprised of an underlying silicon nitride layer, obtained via LPCVD or PECVD procedures, at a thickness between about 200 to 400 Angstroms, and comprised of an overlying silicon oxide layer, obtained via LPCVD or PECVD procedures, at a thickness between about 850 to 1100 Angstroms, using TEOS as a source. 
     
     
       11. The method of  claim 1 , wherein said composite insulator spacers are defined via an anisotropic RIE procedure using CHF 3  as an etchant for silicon oxide, and using Cl 2  as an etchant for silicon nitride. 
     
     
       12. The method of  claim 1 , wherein said third ion implantation procedure, used to create said heavily doped source/drain region, is performed using arsenic or phosphorous ions, at an energy between about 40 to 60 KeV, at a dose between about 3E15 to 6.5E15 atoms/cm 2 . 
     
     
       13. The method of  claim 1 , wherein said anneal procedure is a rapid thermal anneal, (RTA), procedure, performed at a temperature between about 1000 to 1050° C., for a time between about 5 to 15 sec, in a nitrogen or argon ambient. 
     
     
       14. A method of fabricating an input/output N channel, (I/O NMOS), device, on a semiconductor substrate, featuring an implanted nitrogen region, located at an interface of an overlying insulator layer and an underlying, lightly doped source/drain, (LDD), region, comprising the steps of:
 growing a silicon dioxide gate insulator layer on said semiconductor substrate;  
 forming a polysilicon gate structure on said silicon dioxide gate insulator layer;  
 growing a silicon oxide layer on the surface of said polysilicon gate structure, and on the surface of portions of said semiconductor substrate not covered by said polysilicon gate structure;  
 using tetraethylorthosilicate as a source to deposit a TEOS silicon oxide liner layer;  
 performing a first ion implantation procedure to form an N type LDD region in an area of said semiconductor substrate not covered by said polysilicon gate structure;  
 performing a second ion implantation procedure in situ, to form said nitrogen region at said silicon oxide-N type ULDD interface;  
 forming composite insulator spacers on sides of said polysilicon gate structure, comprised of an overlying silicon oxide shape, and an underlying silicon nitride shape;  
 performing a third ion implantation procedure to form an N type, heavily doped source/drain region, in an area of said semiconductor substrate not covered by said polysilicon gate structure, or by said composite insulator spacers; and  
 performing a rapid thermal anneal, (RTA), procedure.  
 
     
     
       15. The method of  claim 14 , wherein said silicon dioxide gate insulator layer is obtained via thermal oxidation procedures, at a temperature between about 650 to 900° C., in an oxygen-steam ambient, to a thickness between about 40 to 80 Angstroms. 
     
     
       16. The method of  claim 14  wherein said polysilicon gate structure is comprised from a polysilicon layer, which is obtained via LPCVD procedures, at a thickness between about 1500 to 2500 Angstroms, and either doped in situ, during deposition via the addition of arsine, or phosphine, to a silane ambient, or deposited intrinsically the doped via implantation of arsenic, or phosphorous ions, then defined via an anisotropic RIE procedure, applied to a polysilicon layer, using Cl 2  or SF 6  as an etchant. 
     
     
       17. The method of  claim 14 , wherein said silicon oxide layer is obtained via thermal oxidation procedures, at a temperature between about 800 to 1015° C., in an oxygen-steam ambient, to a thickness between about 15 to 80 Angstroms. 
     
     
       18. The method of  claim 14 , wherein said TEOS silicon oxide liner layer is deposited to a thickness between about 80 to 250 Angstroms, via LPCVD or PECVD procedures, using tetraethylorthosilicate, (TEOS), as a source. 
     
     
       19. The method of  claim 14 , wherein said first ion implantation procedure, used to form said N type LDD region, is performed using arsenic or phosphorous ions, at an energy between about 20 to 50 KeV, at a dose between about 2E13 to 5E13 atoms/cm 2 . 
     
     
       20. The method of  claim 14 , wherein said second ion implantation procedure, used to create said nitrogen region, is performed using either nitrogen, (N 2   + ), or nitrogen ions, (N + ), as a source, at an energy between about 5 to 25 KeV, at a dose between about 1E14 to 1E15 atoms/cm 2 . 
     
     
       21. The method of  claim 14 , wherein said composite insulator spacers are comprised of an underlying silicon nitride layer, obtained via LPCVD or PECVD procedures, at a thickness between about 200 to 400 Angstroms, and comprised of an overlying silicon oxide layer, obtained via LPCVD or PECVD procedures, at a thickness between about 850 to 1100 Angstroms, using TEOS as a source. 
     
     
       22. The method of  claim 14 , wherein said third ion implantation procedure, used to create said N type, heavily doped source/drain region, is performed using arsenic or phosphorous ions, at an energy between about 40 to 60 KeV, at a dose between about 3E15 to 6.5E15 atoms/cm 2 . 
     
     
       23. The method of  claim 14 , wherein said rapid thermal anneal procedure is performed at a temperature between about 1000 to 1050° C., for a time between about 5 to 15 sec, in a nitrogen or argon ambient. 
     
     
       24. A method of fabricating a metal oxide semiconductor field effect transistor, ( MOSFET )  device on a semiconductor substrate, comprising the steps of:      forming a gate structure overlying a gate insulator layer on said semiconductor substrate;        forming a silicon oxide layer on said gate structure and on the top surface of said semiconductor substrate not covered by said gate structure;        performing a first ion implantation procedure to form an implanted region, in an area of said semiconductor substrate not covered by said gate structure; and        performing a second ion implantation procedure to create a nitrogen region at the interface between the silicon oxide layer and the implanted region.     
     
     
       25. The method of  claim 24 , wherein said MOSFET device is an input/output N channel ( I/O NMOS )  device.   
     
     
       26. The method of  claim 24  wherein said gate insulator layer is formed to a thickness of between about  40  to  80  Angstroms, at a temperature of between about  650  to  900 ° C., in an oxygen- steam ambient.   
     
     
       27. The method of  claim 24 , wherein said step of forming a gate structure includes LPCVD depositing a polysilicon layer at a thickness of between about  1500  to  2500  Angstroms, the polysilicon layer being doped by a method selected from the group consisting of in situ doping during deposition via the addition of arsine or phosphine to a silane ambient, and deposited intrinsically then doped via implantation of arsenic or phosphorous ions. 
     
     
       28. The method of  claim 24 , wherein said step of forming a gate structure includes defining said gate structure via an anisotropic RIE procedure, applied to a polysilicon layer, using Cl 2    or SF   6    as an etchant.   
     
     
       29. The method of  claim 24 , wherein said silicon oxide layer is thermally grown to a thickness of between about  15  to  80  Angstroms, at a temperature of between about  800  to  1015 ° C., in an oxygen- steam ambient.   
     
     
       30. The method of  claim 24 , wherein said first ion implantation procedure used to form said implanted region is performed using arsenic or phosphorous ions at an energy of between about  20  to  50  KeV at a dose of between about  2 E 13  to  5 E 13  atoms/cm 2 . 
     
     
       31. The method of  claim 24 , wherein said second ion implantation procedure used to create said nitrogen region is performed using either nitrogen ( N   2   + ),  or nitrogen ions  ( N   + )  as a source, at an energy between about  5  to  25  KeV, at a dose between about  1 E 14  to  1 E 15  atoms/cm   2 . 
     
     
       32. The method of  claim 30 , wherein said MOSFET device is an input/output N channel ( I/O NMOS )  device.   
     
     
       33. The method of  claim 30 , wherein said gate insulator layer is formed to a thickness of between about  40  to  80  Angstroms, at a temperature between about  650  to  900 ° C., in an oxygen- steam ambient.   
     
     
       34. The method of  claim 30 , wherein said gate structure is a polysilicon gate structure, comprised from a polysilicon layer which is obtained via LPCVD procedures, at a thickness between about  1500  to  2500  Angstroms, and either doped in situ during deposition via the addition of arsine or phosphine, to a silane ambient, or deposited intrinsically then doped via implantation of arsenic or phosphorous ions. 
     
     
       35. The method of  claim 30 , wherein said gate structure is defined via an anisotropic RIE procedure, applied to a polysilicon layer, using Cl 2    or SF   6    as an etchant.   
     
     
       36. The method of  claim 30 , wherein said first ion implantation procedure used to form said implanted region is performed using arsenic or phosphorous ions at an energy of between about  20  to  50  KeV, at a dose of between about  2 E 13  to  5 E 13  atoms/cm 2 . 
     
     
       37. The method of  claim 30 , wherein said second ion implantation procedure used to create said nitrogen region is performed using either nitrogen ( N   2   + ), or nitrogen ions ( N   + )  as a source, at an energy of between about  5  to  25  KeV, at a dose of between about  1 E 14  to  1 E 15  atoms/cm   2 .