Three dimensional hexagonal matrix memory array

Abstract

A nonvolatile memory device includes a plurality of nonvolatile memory cells arranged in a substantially hexagonal pattern. The nonvolatile memory cells may be pillar shaped non-volatile memory cells which can be patterned using triple or quadruple exposure lithography or by using a self-assembling layer.

What is claimed is: 
     
       1. A nonvolatile memory device, comprising:
 a plurality of nonvolatile memory cells arranged in a substantially hexagonal pattern, 
 wherein the nonvolatile memory cells are arranged in a plurality of subarrays which are substantially parallelogram shaped and have a non-square corner, 
 wherein each subarray among the plurality of subarrays includes a plurality of nonvolatile memory cells arranged in a substantially hexagonal pattern; 
 wherein each of the plurality of subarrays has parallel sides that extend along a first direction and a non-parallel side that adjoins a respective driver circuit block for driving the subarray; 
 wherein the driver circuit blocks for the plurality of subarrays have a staggered layout such that a layout of each driver circuit block is shifted along the first direction from a horizontal line that is perpendicular to the first direction and passes through the non-square corner by a respective lateral offset distance; and 
 the lateral offset distances differ among one another among an entire set of driver circuit blocks that drive the plurality of subarrays. 
 
     
     
       2. The nonvolatile memory device of  claim 1 , wherein:
 the plurality of nonvolatile memory cells comprises a plurality of pillar shaped current steering elements; and 
 the substantially hexagonal pattern comprises a repeating pattern of seven nonvolatile memory cells having a central nonvolatile memory cell surrounded by six other nonvolatile memory cells arranged in a hexagonal layout around the central nonvolatile memory cell. 
 
     
     
       3. The nonvolatile memory device of  claim 1 , wherein the device comprises:
 a first nonvolatile memory cell, 
 a second nonvolatile memory cell, and 
 a third nonvolatile memory cell; 
 wherein the first nonvolatile memory cell, the second nonvolatile memory cell, and the third nonvolatile memory cell are equidistant from each other and are located in a same plane. 
 
     
     
       4. The nonvolatile memory device of  claim 3 , wherein the first nonvolatile memory cell, the second nonvolatile memory cell, and the third nonvolatile memory cell have a cell half pitch of less than about 32 nm. 
     
     
       5. The nonvolatile memory device of  claim 1 , wherein the device comprises a monolithic, three dimensional array of nonvolatile memory cells. 
     
     
       6. The nonvolatile memory device of  claim 1 , wherein each nonvolatile memory cell comprises a one time programmable or a rewritable cell selected from at least one of antifuse, fuse, diode and antifuse arranged in a series, polysilicon memory effect cell, metal oxide memory, switchable complex metal oxide, carbon nanotube memory, graphene switchable resistance material, phase change material memory, conductive bridge element, or switchable polymer memory. 
     
     
       7. The nonvolatile memory device of claim 5, wherein:
 the monolithic, three dimensional array of nonvolatile memory cells is located over a silicon substrate;   at least one memory cell in a first device level of the array is located over another memory cell in a second device level over the silicon substrate; and   an integrated circuit comprising a driver circuit for the array of nonvolatile memory cells is located in the silicon substrate or on a surface of the silicon substrate.    
     
     
       8. The nonvolatile memory device of claim 1, further comprising
 a plurality of word lines connected to the plurality of nonvolatile memory cells; and   a plurality of bit lines connected to the plurality of nonvolatile memory cells.    
     
     
       9. The nonvolatile memory device of claim 8, wherein the first direction is a direction along which bit lines of the plurality of nonvolatile memory cells extend.  
     
     
       10. The nonvolatile memory device of claim 8, wherein the first direction is a direction along which word lines of the plurality of nonvolatile memory cells extend.  
     
     
       11. The nonvolatile memory device of claim 8, wherein the plurality of word lines cross the plurality of bit lines at an angle of about 60 degrees.  
     
     
       12. A nonvolatile memory device, comprising:
 a monolithic, three dimensional array of nonvolatile memory cells located over a silicon substrate and comprising a plurality of nonvolatile memory cells arranged in a substantially hexagonal pattern; and   an integrated circuit comprising a driver circuit for the array of nonvolatile memory cells located in the silicon substrate or on a surface of the silicon substrate, and   wherein the nonvolatile memory cells are arranged in a plurality of subarrays which are substantially parallelogram shaped and have a non-square corner;   wherein each subarray among the plurality of subarrays includes a plurality of nonvolatile memory cells arranged in a substantially hexagonal pattern;   wherein each of the plurality of subarrays has parallel sides that extend along a first direction and a non-parallel side that adjoins a respective driver circuit block for driving the subarray;   wherein the driver circuit blocks for the plurality of subarrays have a staggered layout such that a layout of each driver circuit block is shifted along the first direction from a horizontal line that is perpendicular to the first direction and passes through the non-square corner by a respective lateral offset distance; and   the lateral offset distances differ among one another among an entire set of driver circuit blocks that drive the plurality of subarrays.    
     
     
       13. The nonvolatile memory device of claim 8, wherein:
 the plurality of nonvolatile memory cells comprises a plurality of pillar shaped current steering elements; and   the substantially hexagonal pattern comprises a repeating pattern of seven nonvolatile memory cells having a central nonvolatile memory cell surrounded by six other nonvolatile memory cells arranged in a hexagonal layout around the central nonvolatile memory cell.    
     
     
       14. The nonvolatile memory device of claim 8, wherein the device comprises:
 a first nonvolatile memory cell,   a second nonvolatile memory cell, and   a third nonvolatile memory cell;   wherein the first nonvolatile memory cell, the second nonvolatile memory cell, and the third nonvolatile memory cell are equidistant from each other and are located in a same plane.    
     
     
       15. The nonvolatile memory device of claim 14, wherein the first nonvolatile memory cell, the second nonvolatile memory cell, and the third nonvolatile memory cell have a cell half pitch of less than about 32 nm.  
     
     
       16. The nonvolatile memory device of claim 12, wherein each nonvolatile memory cell comprises a one time programmable or a rewritable cell selected from at least one of antifuse, fuse, diode and antifuse arranged in a series, polysilicon memory effect cell, metal oxide memory, switchable complex metal oxide, carbon nanotube memory, graphene switchable resistance material, phase change material memory, conductive bridge element, or switchable polymer memory.  
     
     
       17. The nonvolatile memory device of claim 12, further comprising:
 a plurality of word lines connected to the plurality of nonvolatile memory cells; and   a plurality of bit lines connected to the plurality of nonvolatile memory cells.    
     
     
       18. The nonvolatile memory device of claim 17, wherein the first direction is a direction along which bit lines of the plurality of nonvolatile memory cells extend.  
     
     
       19. The nonvolatile memory device of claim 17, wherein the first direction is a direction along which word lines of the plurality of nonvolatile memory cells extend.  
     
     
       20. The nonvolatile memory device of claim 12, further comprising:
 a plurality of word lines connected to the plurality of nonvolatile memory cells; and   a plurality of bit lines connected to the plurality of nonvolatile memory cells;   wherein the plurality of word lines cross the plurality of bit lines at an angle of about 60 degrees.