Semiconductor device

Abstract

According to one embodiment, a semiconductor device includes first and second regions, a first insulating portion, and first, second, and third electrodes. The first region includes first and second partial regions, and a third partial region between the first and second partial regions. The second region includes fourth and fifth partial regions. The fourth partial region overlaps the first partial region. The fifth partial region overlaps the second partial region. The first insulating portion includes first, second, and third insulating regions. The first insulating region is provided between the second insulating region and the third partial region and between the third insulating region and the third partial region. The first electrode is electrically connected to the fourth partial region. The second electrode is away from the first electrode and is electrically connected to the fifth partial region. The third electrode is provided between the first and second electrodes.

What is claimed is: 
     
       1. A semiconductor device comprising:
 a first region including A x1 Ga 1-x1 N (0≤x1<1), the first region including
 a first partial region, 
 a second partial region, and 
 a third partial region between the first partial region and the second partial region; 
 
 a second region including A x2 Ga 1-x2 N (0<x2<1, x1<x2), the second region including
 a fourth partial region overlapping the first partial region in a first direction crossing a second direction from the first partial region to the second partial region, and 
 a fifth partial region overlapping the second partial region in the first direction; 
 
 a first insulating portion including
 a first insulating region overlapping the third partial region in the first direction, 
 a second insulating region away from a part of the first insulating region in the first direction, and 
 a third insulating region away from another part of the first insulating region in the first direction and away from the second insulating region in the second direction, 
 the first insulating region being provided between the second insulating region and the third partial region and between the third insulating region and the third partial region; 
 
 a first electrode electrically connected to the fourth partial region; 
 a second electrode away from the first electrode in the second direction, the second electrode electrically being electrically connected to the fifth partial region; and 
 a third electrode provided between the first electrode and the second electrode, the third electrode including
 a first conductive portion provided between the second insulating region and the third insulating region, and 
 a second conductive portion provided between the fourth partial region and the fifth partial region in the second direction, the second conductive portion being longer in the second direction than the first conductive portion, a part of the second conductive portion being provided between the first insulating region and the second insulating region, another part of the second conductive portion being provided between the first insulating region and the third insulating region, and another part of the second conductive portion being provided between the first insulating region and the first conductive portion. 
 
 
     
     
       2. The device according to  claim 1 , further comprising:
 a second insulating portion; and 
 a third insulating portion, 
 the fifth fourth partial region being provided between the first partial region and the second insulating portion in the first direction, 
 the fifth partial region being provided between the second partial region and the third insulating portion in the first direction, and 
 the second conductive portion including a first conductive region provided between the second insulating portion and the second insulating region in the second direction. 
 
     
     
       3. The device according to  claim 2 ,
 wherein the second insulating portion has a first surface and a second surface, 
 the first surface and the second surface cross the first direction, and are along the second direction, 
 the second surface is provided between the first surface and the fourth partial region, and 
 a direction from the first surface to the first conductive portion is along the second direction. 
 
     
     
       4. The device according to  claim 3 ,
 wherein the first conductive region does not overlap the first surface in the first direction. 
 
     
     
       5. The device according to  claim 3 ,
 wherein a position in the first direction of the first conductive region is between a position in the first direction of the first surface and a position in the first direction of the first region. 
 
     
     
       6. The device according to  claim 3 ,
 wherein the second conductive portion further includes a second conductive region, 
 the second conductive region is provided between the third insulating portion and the third insulating region in the second direction, 
 the third insulating portion has a third surface and a fourth surface, 
 the third surface and the fourth surface cross the first direction, and are along the second direction, 
 the fourth surface is provided between the third surface and the fifth partial region, and 
 a direction from the third surface to the first conductive portion is along the second direction. 
 
     
     
       7. The device according to  claim 6 ,
 wherein the second conductive region does not overlap the third surface in the first direction. 
 
     
     
       8. The device according to  claim 6 ,
 wherein a position in the first direction of the second conductive region is between a position in the first direction of the third surface and a position in the first direction of the first region. 
 
     
     
       9. The device according to  claim 6 , further comprising:
 a third conductive portion connected to the first conductive portion, 
 the first conductive portion, the second insulating region, and the third insulating region are provided between the second conductive portion and the third conductive portion, and 
 the third conductive portion not overlapping the third surface in the first direction. 
 
     
     
       10. The device according to  claim 3 , further comprising:
 a third conductive portion connected to the first conductive portion, 
 the first conductive portion, the second insulating region, and the third insulating region being provided between the second conductive portion and the third conductive portion, and 
 the third conductive portion not overlapping the first surface in the first direction. 
 
     
     
       11. The device according to  claim 3 ,
 wherein the first insulating portion includes silicon and oxygen, and 
 the second insulating portion and the third insulating portion include silicon and nitrogen. 
 
     
     
       12. The device according to  claim 1 ,
 wherein the first conductive portion, the second insulating region, and the third insulating region are provided between the first electrode and the second electrode in the second direction. 
 
     
     
       13. The device according to  claim 1 ,
 wherein the first conductive portion includes at least one selected from the group consisting of titanium, gold, and aluminum, and nitrogen, and 
 the second conductive portion includes at least one selected from the group consisting of titanium and molybdenum. 
 
     
     
       14. A semiconductor device comprising:
 a first region including Al x1 Ga 1-x1 N (0≤x1<1), the first region including
 a first partial region, 
 a second partial region, and 
 a third partial region between the first partial region and the second partial region; 
   a second region including Al x2 Ga 1-x2 N (0<x2<1, x1<x2), the second region including
 a fourth partial region overlapping the first partial region in a first direction crossing a second direction from the first partial region to the second partial region, and 
 a fifth partial region overlapping the second partial region in the first direction; 
   a first insulating portion including
 a first insulating region, 
 a second insulating region, and 
 a third insulating region, 
 the first insulating region being provided between the second insulating region and the third partial region and between the third insulating region and the third partial region; 
   a first electrode electrically connected to the fourth partial region;   a second electrode away from the first electrode in the second direction, the second electrode being electrically connected to the fifth partial region; and   a third electrode provided between the first electrode and the second electrode, the third electrode including
 a first conductive portion provided between the second insulating region and the third insulating region in the second direction, and 
 a second conductive portion provided between the fourth partial region and the fifth partial region in the second direction, the second conductive portion being longer in the second direction than the first conductive portion, the second conductive portion including a first part, a second part, and a third part, the first part being provided between the first insulating region and the second insulating region, the second part being provided between the first insulating region and the third insulating region, the first insulating region being provided between the third partial region and the first conductive portion in the first direction, the third part being provided between the first insulating region and the first conductive portion, a part of the first insulating portion being provided between the fourth partial region and the second conductive portion in the second direction, and another part of the first insulating portion being provided between the fifth partial region and the second conductive portion in the second direction. 
   
     
     
       15. The device according to claim 14, further comprising:
 a second insulating portion; and   a third insulating portion,   the fourth partial region being provided between the first partial region and the second insulating portion in the first direction,   the fifth partial region being provided between the second partial region and the third insulating portion in the first direction, and   the second conductive portion including a first conductive region provided between the second insulating portion and the second insulating region in the second direction.   
     
     
       16. The device according to claim 15,
 wherein the second insulating portion has a first surface and a second surface,   the first surface and the second surface cross the first direction, and are along the second direction,   the second surface is provided between the first surface and the fourth partial region, and   a direction from the first surface to the first conductive portion is along the second direction.   
     
     
       17. The device according to claim 16,
 wherein the first conductive region does not overlap the first surface in the first direction.   
     
     
       18. The device according to claim 16,
 wherein a position in the first direction of the first conductive region is between a position in the first direction of the first surface and a position in the first direction of the first region.   
     
     
       19. The device according to claim 16,
 wherein the second conductive portion further includes a second conductive region,   the second conductive region is provided between the third insulating portion and the third insulating region in the second direction,   the third insulating portion has a third surface and a fourth surface,   the third surface and the fourth surface cross the first direction, and are along the second direction,   the fourth surface is provided between the third surface and the fifth partial region, and   a direction from the third surface to the first conductive portion is along the second direction.   
     
     
       20. The device according to claim 19,
 wherein the second conductive region does not overlap the third surface in the first direction.   
     
     
       21. The device according to claim 19,
 wherein a position in the first direction of the second conductive region is between a position in the first direction of the third surface and a position in the first direction of the first region.   
     
     
       22. The device according to claim 19, further comprising:
 a third conductive portion connected to the first conductive portion,   the first conductive portion, the second insulating region, and the third insulating region being provided between the second conductive portion and the third conductive portion, and   the third conductive portion not overlapping the first surface in the first direction.   
     
     
       23. The device according to claim 19, further comprising:
 a third conductive portion connected to the first conductive portion,   the first conductive portion, the second insulating region, and the third insulating region are provided between the second conductive portion and the third conductive portion, and   the third conductive portion not overlapping the third surface in the first direction.   
     
     
       24. The device according to claim 19,
 wherein the first insulating portion includes silicon and oxygen, and   the second insulating portion and the third insulating portion include silicon and nitrogen.   
     
     
       25. The device according to claim 14,
 wherein the first conductive portion, the second insulating region, and the third insulating region are provided between the first electrode and the second electrode in the second direction.   
     
     
       26. The device according to claim 14,
 wherein the first conductive portion includes at least one selected from the group consisting of titanium, gold, and aluminum, and nitrogen, and   the second conductive portion includes at least one selected from the group consisting of titanium and molybdenum.