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USRE50596EActiveUtilityPatentIndex 61

On-chip reliability monitor and method

Assignee: MARVELL ASIA PTE LTDPriority: Feb 23, 2018Filed: Sep 29, 2021Granted: Sep 23, 2025
Est. expiryFeb 23, 2038(~11.6 yrs left)· nominal 20-yr term from priority
Inventors:FIFIELD JOHN AHUNT-SCHROEDER ERICJACUNSKI MARK D
G01R 31/2879G01R 31/2875G01R 31/2642G01R 31/2856G01R 31/2851
61
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Claims

Abstract

Disclosed are an on-chip reliability monitor and method. The monitor includes a test circuit with a test device, a reference circuit with a reference device, and a comparator circuit. The monitor periodically switches from operation in a stress mode, to operation in a test mode, and back. During each stress mode, the test device is subjected to stress conditions that emulate the operating conditions of an on-chip functional device while the reference device remains essentially unstressed. During each test mode, the comparator circuit compares a parameter of the test device to the same parameter of the reference device and outputs a status signal based on the difference between the parameters. When the status signal switches values, it is an indicator that the functional device has been subjected to a predetermined number of power-on-hours. Optionally, multiple monitors can be cascaded together to more accurately monitor stress-induced changes over time.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. An integrated circuit chip comprising:
 a substrate; and 
 a reliability monitor on the substrate and comprising: 
 a test circuit comprising a test device; 
 a reference circuit comprising a reference device; wherein the test device and the reference device are duplicates of a function device of the integrated circuit chip; and 
 a comparator circuit connected to the test circuit and the reference circuit, 
 wherein, when the integrated circuit chip is powered on, the reliability monitor is alternatingly operable in stress and test modes, 
 wherein, during each stress mode, the test device is subjected to stress conditions that emulate operating conditions of a the functional device and the reference device is unstressed, and 
 wherein, during each test mode, the stress conditions are removed from the test device and the comparator circuit compares a test parameter of the test device to a reference parameter of the reference device and outputs a status signal based on a difference between the test parameter and the reference parameter, and 
 when the status signal output by the reliability monitor switches values, a second reliability monitor on the integrated circuit chip is enabled so that the second reliability monitor alternatingly operates in stress and test modes. 
 
     
     
       2. The integrated circuit chip of  claim 1 ,
 wherein, when the difference between the test parameter and the reference parameter reaches a predetermined threshold amount, during a test mode, the status signal switches value, 
 wherein, after switching values, the status signal remains constant, and 
 wherein, when the integrated circuit chip is powered off and back on, the status signal is automatically reset to a last held value. 
 
     
     
       3. The integrated circuit chip of  claim 1 , wherein operation of the reliability monitor is controlled by clock signals when the integrated circuit chip is powered on such that the reliability monitor periodically switches operation from a stress mode to a test mode and back. 
     
     
       4. The integrated circuit chip of  claim 1 , wherein the comparator circuit comprises:
 a current mirror; 
 a voltage latch; and 
 a status latch, 
 wherein the current mirror comprises:
 a first leg comprising first nodes coupled to the test circuit and the voltage latch, respectively, such that, during a test mode, a first current flows through one first node to the test device and such that an analog test voltage is exhibited at another first node; and 
 a second leg comprising second nodes coupled to the reference circuit and the voltage latch, respectively, such that, during the test mode, a second current flows through one second node to the reference device and such that an analog reference voltage is exhibited at another second node, 
 
 wherein the voltage latch senses the analog test voltage and the analog reference voltage and converts the analog test voltage to a digital test voltage and the analog reference voltage to a digital reference voltage, and 
 wherein the status latch senses the digital test voltage and the digital reference voltage and outputs the status signal based on the digital test voltage and the digital reference voltage. 
 
     
     
       5. The integrated circuit chip of  claim 4 , wherein the current mirror has a hysteresis function enabled by the status signal. 
     
     
       6. The integrated circuit chip of  claim 1 ,
 wherein the test circuit comprises:
 an N-type field effect transistor comprising the test device; 
 a multiplexer; and 
 a plurality of P-type field effect transistors, 
 
 wherein the stress conditions bias the test device so that the test device is susceptible to hot electron injection-induced saturation drain current degradation, 
 wherein a source of the N-type field effect transistor is electrically connected to ground and a drain of the N-type field effect transistor is electrically connected to drains of a first P-type field effect transistor and a second P-type field effect transistor, 
 wherein a source of the second P-type field effect transistor is electrically connected to a drain of a third P-type field effect transistor and to a drain of a fourth P-type field effect transistor, 
 wherein sources of the first P-type field effect transistor, the third P-type field effect transistor and the fourth P-type field effect transistor are electrically connected to a first voltage, 
 wherein a gate of the N-type field effect transistor is selectively connected by the multiplexer to one of a second voltage and a third voltage that is lower than the second voltage, and 
 wherein the comparator circuit is electrically connected to a test node at the drains of the third P-type field effect transistor and the fourth P-type field effect transistor and at the source of the second P-type field effect transistor. 
 
     
     
       7. The integrated circuit chip of  claim 1 ,
 wherein the test circuit comprises an N-type field effect transistor comprising the test device, and 
 wherein the stress conditions bias the test device in inversion so that the test device is susceptible to positive bias temperature instability. 
 
     
     
       8. An integrated circuit chip comprising:
 a substrate; and 
 multiple cascaded reliability monitors on the substrate, 
 wherein the multiple cascaded reliability monitors are essentially identical, 
 wherein each reliability monitor comprises: a test circuit comprising a test device; a reference circuit comprising a reference device; and a comparator circuit connected to the test circuit and the reference circuit, 
 wherein each reliability monitor is alternatingly operable in stress and test modes when the integrated circuit chip is powered on and when the reliability monitor is enabled, 
 wherein, during each stress mode, the test device is subjected to stress conditions that emulate operating conditions of a functional device and the reference device is unstressed, 
 wherein, during each test mode, the stress conditions are removed from the test device and the comparator circuit compares a test parameter of the test device to a reference parameter of the reference device and outputs a status signal based on a difference between the test parameter and the reference parameter, 
 wherein, when the difference between the test parameter and the reference parameter reaches a predetermined threshold amount, during a test mode, the status signal switches values and then remains constant, and 
 wherein the multiple cascaded reliability monitors comprise at least a first reliability monitor enabled by an enabled signal and a second reliability monitor coupled to the first reliability monitor such that the second reliability monitor is enabled when the status signal output from the first reliability monitor switches values. 
 
     
     
       9. The integrated circuit chip of  claim 8 , wherein, when the integrated circuit chip is powered off and back on, status signals output from the reliability monitors are automatically reset to corresponding last held values. 
     
     
       10. The integrated circuit chip of  claim 8 , wherein operation of the multiple cascaded reliability monitors is controlled by clock signals when the integrated circuit chip is powered on such that, once enabled, each reliability monitor periodically switches operation from a stress mode to the test mode and back. 
     
     
       11. The integrated circuit chip of  claim 8 , wherein the comparator circuit comprises:
 a current mirror; 
 a voltage latch; and 
 a status latch, 
 wherein the current mirror comprises:
 a first leg comprising first nodes coupled to the test circuit and the voltage latch, respectively, such that, during the test mode, a first current flows through one first node to the test device and such that an analog test voltage is exhibited at another first node; and 
 a second leg comprising second nodes coupled to the reference circuit and the voltage latch, respectively, such that, during the test mode, a second current flows through one second node to the reference device and such that an analog reference voltage is exhibited at another second node, 
 
 wherein the voltage latch senses the analog test voltage and the analog reference voltage and converts the analog test voltage to a digital test voltage and the analog reference voltage to a digital reference voltage, and 
 wherein the status latch senses the digital test voltage and the digital reference voltage and outputs the status signal based on the digital test voltage and the digital reference voltage. 
 
     
     
       12. The integrated circuit chip of  claim 11 , wherein the current mirror has a hysteresis function enabled by the status signal. 
     
     
       13. The integrated circuit chip of  claim 8 ,
 wherein the test circuit comprises:
 an N-type field effect transistor comprising the test device; 
 a multiplexer; and 
 a plurality of P-type field effect transistors, 
 
 wherein the stress conditions bias the test device so that the test device is susceptible to hot electron injection-induced saturation drain current degradation, 
 wherein a source of the N-type field effect transistor is electrically connected to ground and a drain of the N-type field effect transistor is electrically connected to drains of a first P-type field effect transistor and a second P-type field effect transistor, 
 wherein a source of the second P-type field effect transistor is electrically connected to a drain of a third P-type field effect transistor and to a drain of a fourth P-type field effect transistor, 
 wherein sources of the first P-type field effect transistor, the third P-type field effect transistor and the fourth P-type field effect transistor are electrically connected to a first voltage, 
 wherein a gate of the N-type field effect transistor is selectively connected by the multiplexer to one of a second voltage and a third voltage that is lower than the second voltage, and 
 wherein the comparator circuit is electrically connected to a test node at the drains of the third P-type field effect transistor and the fourth P-type field effect transistor and at the source of the second P-type field effect transistor. 
 
     
     
       14. The integrated circuit chip of  claim 8 ,
 wherein the test circuit comprises an N-type field effect transistor comprising the test device, and 
 wherein the stress conditions bias the test device in inversion so that the test device is susceptible to positive bias temperature instability. 
 
     
     
       15. A reliability monitoring method comprising:
 powering on an integrated circuit chip comprising a reliability monitor comprising: 
 a test circuit comprising a test device; 
 a reference circuit comprising a reference device, wherein the test device and the reference device are duplicates of a functional device of the integrated circuit chip; and 
 a comparator circuit connected to the test circuit and the reference circuit; and 
 after the powering on of the integrated circuit chip, enabling the reliability monitor so that the reliability monitor alternatingly operates in stress and test modes, 
 wherein operating the reliability monitor in a stress mode comprises: subjecting the test device to stress conditions that emulate operating conditions of a  the functional device; and leaving the reference device unstressed, and
 wherein operating the reliability monitor in a test mode comprises: removing the stress conditions from the test device; comparing a test parameter of the test device to a reference parameter of the reference device; and outputting a status signal based on a difference between the test parameter and the reference parameter; 
 
 the reliabililty monitoring method further comprising when the status signal output by the reliability monitor switches values, enabling a second reliability monitor on the integrated circuit chip so that the second reliability monitor alternatingly operates in stress and test modes. 
 
     
     
       16. The reliability monitoring method of  claim 15 , wherein the outputting of the status signal comprises:
 when the difference between the test parameter and the reference parameter reaches a predetermined threshold amount, during the test mode, switching values of the status signal and, after the switching, ensuring that the status signal remains constant; and 
 when the integrated circuit chip is powered off and back on, automatically resetting the status signal to a last held value. 
 
     
     
       17. The reliability monitoring method of  claim 15 , further comprising controlling operation of the reliability monitor using clock signals such that, when the integrated circuit chip is powered on and the reliability monitor is enabled, operation of the reliability monitor periodically switches from the stress mode to the test mode and back. 
     
     
       18. The reliability monitoring method of  claim 15 , wherein the comparing comprises:
 generating an analog test voltage based on a test current flowing to the test device and an analog reference voltage based on a reference current flowing to the reference device; 
 converting the analog test voltage to a digital test voltage and the analog reference voltage to a digital reference voltage; and 
 outputting the status signal with a low value when the digital test voltage and the digital reference voltage are equal and with a high value when the digital test voltage and the digital reference voltage are different. 
 
     
     
       19. The reliability monitoring method of  claim 15 ,
 wherein the test circuit comprises an N-type field effect transistor comprising the test device, and 
 wherein the stress conditions bias the test device so that the test device is susceptible to one of the following: hot electron injection-induced saturation drain current degradation and positive bias temperature instability. 
 
     
     
       20. The reliability monitoring method of  claim 15 , further comprising, when the status signal output by the reliability monitor switches values, enabling a second reliability monitor on the integrated circuit chip so that the second reliability monitor alternatingly operates in stress and test modes. 
     
     
       21. An Integrated Circuit (IC), comprising:
 an electronic circuit comprising multiple electronic components; and   reliability monitoring circuitry embedded in the IC, which is configured to assess, during operation of the IC in a host system, one or more parameters indicative of a reliability of one or more components-of-interest, selected from among the electronic components, and to provide an output indicative of the reliability of the one or more components-of-interest;   wherein the IC further comprises a plurality of duplicate components that are configured to mimic one of the one or more components-of-interest, and wherein the reliability monitoring circuitry is coupled to the plurality of duplicate components and is configured to assess the one or more parameters on the plurality of duplicate components; and   wherein a plurality of the duplicate components mimicking a same component-of-interest is cascaded, and wherein the reliability monitoring circuitry is configured to assess the one or more parameters for the same component-of interest based on corresponding parameters assessed on the plurality of the duplicate components.   
     
     
       22. The IC according to  claim 21 , wherein the one or more parameters includes at least one of a voltage, a current, and a temperature of the one or more components-of-interest. 
     
     
       23. The IC according to  claim 21 , wherein a duplicate component of the plurality of duplicate components is configured to mimic a respective component-of-interest by undergoing a usage pattern that mimics the usage pattern of the respective component-of-interest. 
     
     
       24. The IC according to  claim 21 , wherein at least one of the one or more components-of-interest comprises a Field-Effect Transistor (FET), and wherein the reliability monitoring circuitry is configured to assess for the FET at least one or both of (i) a drain-side saturation current and (ii) a threshold voltage. 
     
     
       25. The IC according to  claim 21 , wherein the reliability monitoring circuitry is configured to issue an alert in response to the reliability violating a predefined condition, the predefined condition being indicative of a change in the one or more parameters by a threshold amount. 
     
     
       26. The IC according to  claim 21 , wherein the one or more components-of-interest include at least one of active semiconductor devices. 
     
     
       27. The IC according to  claim 21 , wherein the output is indicative of an amount of time for which the one or more components-of-interest is powered on. 
     
     
       28. The IC according to  claim 21 , wherein the output indicates whether the one or more components-of-interest is approaching an end of its useful life. 
     
     
       29. The IC according to  claim 21 , wherein the reliability monitoring circuitry is configured to:
 subject a first duplicate component of the plurality of duplicate components to a usage pattern that mimics the usage pattern of the respective component-of-interest while not subjecting a second duplicate component of the plurality of duplicate components to the usage pattern;   compare a first parameter of the one or more parameters assessed on the first duplicate component to a second parameter of the one or more parameters assessed on the second duplicate component; and   provide the output based on the comparison of the first parameter and the second parameter.   
     
     
       30. The IC according to  claim 21 , wherein the reliability monitoring circuitry is configured to:
 assess, during an initial time period of operation of the one or more components-of-interest, a first parameter of the one or more parameters on a first duplicate component of the plurality of duplicate components;   assess, during a subsequent time period of operation of the one or more components-of-interest, a second parameter of the one or more parameters on a second duplicate component of the plurality of duplicate components; and   provide a second output indicative of end-of-life of the one or more components-of-interest based on a comparison of the respective first and second parameters.   
     
     
       31. A method for reliability monitoring in an Integrated Circuit (IC) comprising multiple electronic components, the method comprising:
 configuring reliability monitoring circuitry embedded in the IC, to assess, during operation of the IC in a host system, one or more parameters indicative of a reliability of one or more components-of-interest, selected from among the electronic components; and   providing, from the reliability monitoring circuitry embedded in the IC, an output indicative of the reliability of the one or more components-of-interest;   wherein assessing the one or more parameters comprises assessing the one or more parameters of a plurality of duplicate components in the IC, which are configured to mimic the one or more components-of-interest;   the method for reliability monitoring further comprising:   cascading a plurality of the duplicate components to mimic a same component-of-interest; and   assessing the one or more parameters for the same component-of-interest based on corresponding parameters assessed on the plurality of the duplicate components.   
     
     
       32. The method for reliability monitoring according to  claim 31 , further comprising:
 subjecting a first duplicate component of the one or more duplicate components to a usage pattern that mimics the usage pattern of the respective component-of-interest while not subjecting a second duplicate component of the one or more duplicate components to the usage pattern;   comparing a first parameter of the one or more parameters assessed on the first duplicate component to a second parameter of the one or more parameters assessed on the second duplicate component; and   providing the output based on the comparison of the first parameter and the second parameter.   
     
     
       33. The method for reliability monitoring according to  claim 31 , further comprising:
 assessing, during an initial time period of operation of the one or more components-of-interest, a first parameter of the one or more parameters on a first duplicate component of the one or more duplicate components;   assessing, during a subsequent time period of operation of the one or more components-of-interest, a second parameter of the one or more parameters on a second duplicate component of the one or more duplicate components; and   providing a second output indicative of end-of-life of the one or more components-of-interest based on a comparison of the respective first and second parameters.   
     
     
       34. The method for reliability monitoring according to  claim 31 , further comprising selecting at least one of a voltage, a current, and a temperature of the one or more components-of-interest as the one or more parameters. 
     
     
       35. The method for reliability monitoring according to claim 31, further comprising configuring a duplicate component of the plurality of duplicate components to mimic a respective component of-interest by undergoing a usage pattern that mimics the usage pattern of the respective component-of-interest. 
     
     
       36. The method for reliability monitoring according to  claim 31 , further comprising issuing an alert in response to the reliability violating a predefined condition, the predefined condition being indicative of a change in the one or more parameters by a threshold amount. 
     
     
       37. The method for reliability monitoring according to  claim 31 , further comprising selecting at least one of active semiconductor devices as the one or more components-of-interest. 
     
     
       38. The method for reliability monitoring according to  claim 31 , further comprising indicating using the output at least one of (i) an amount of time for which the one or more components-of-interest is powered on and (ii) whether the one or more components-of-interest is approaching an end of its useful life.

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