Assignee
SOKUDO CO LTD
JP·40 granted patents·37 pending applications·462 citations·filing 2004–2014
Top patents by PatentIndex Score
77 records- 0198US7357842B2Cluster tool architecture for processing a substrateSOKUDO CO LTD·Filed 2005·Granted Apr 15, 2008·106 cites·11 claims
- 0297US7699021B2Cluster tool substrate throughput optimizationSOKUDO CO LTD·Filed 2006·Granted Apr 20, 2010·45 cites·8 claims
- 0395US7497633B2Substrate processing apparatus and substrate processing methodSOKUDO CO LTD·Filed 2005·Granted Mar 3, 2009·42 cites·28 claims
- 0493US8708587B2Substrate treating apparatus with inter-unit buffersSOKUDO CO LTD·Filed 2013·Granted Apr 29, 2014·14 cites·20 claims
- 0593US7255747B2Coat/develop module with independent stationsSOKUDO CO LTD·Filed 2005·Granted Aug 14, 2007·16 cites·13 claims
- 0692US7641405B2Substrate processing apparatus with integrated top and edge cleaning unitSOKUDO CO LTD·Filed 2008·Granted Jan 5, 2010·20 cites·10 claims
- 0792US7604424B2Substrate processing apparatusSOKUDO CO LTD·Filed 2006·Granted Oct 20, 2009·29 cites·26 claims
- 0889US8034190B2Substrate processing apparatus and substrate processing methodSOKUDO CO LTD·Filed 2010·Granted Oct 11, 2011·22 cites·17 claims
- 0988US7282675B2Integrated thermal unit having a shuttle with a temperature controlled surfaceSOKUDO CO LTD·Filed 2005·Granted Oct 16, 2007·14 cites·16 claims
- 1087US7274005B2Bake plate having engageable thermal massSOKUDO CO LTD·Filed 2005·Granted Sep 25, 2007·12 cites·10 claims
- 1186US7521915B2Wafer bevel particle detectionSOKUDO CO LTD·Filed 2006·Granted Apr 21, 2009·12 cites·20 claims
- 1286US7497026B2Method and system for detection of wafer centering in a track lithography toolSOKUDO CO LTD·Filed 2007·Granted Mar 3, 2009·14 cites·18 claims
- 1385US7297906B2Integrated thermal unit having a shuttle with two-axis movementSOKUDO CO LTD·Filed 2005·Granted Nov 20, 2007·11 cites·13 claims
- 1483US7641406B2Bevel inspection apparatus for substrate processingSOKUDO CO LTD·Filed 2008·Granted Jan 5, 2010·9 cites·16 claims
- 1581US7522823B2Thermal processing apparatus, thermal processing method, and substrate processing apparatusSOKUDO CO LTD·Filed 2004·Granted Apr 21, 2009·26 cites·16 claims
- 1680US7534627B2Methods and systems for controlling critical dimensions in track lithography toolsSOKUDO CO LTD·Filed 2007·Granted May 19, 2009·11 cites·20 claims
- 1778US7601934B2Integrated thermal unit having a shuttle with a temperature controlled surfaceSOKUDO CO LTD·Filed 2007·Granted Oct 13, 2009·6 cites·20 claims
- 1878US7427728B2Zone control heater plate for track lithography systemsSOKUDO CO LTD·Filed 2006·Granted Sep 23, 2008·5 cites·9 claims
- 1977US7371022B2Developer endpoint detection in a track lithography systemSOKUDO CO LTD·Filed 2005·Granted May 13, 2008·2 cites·10 claims
- 2076US7741585B2Integrated thermal unit having a shuttle with two-axis movementSOKUDO CO LTD·Filed 2007·Granted Jun 22, 2010·5 cites·20 claims
- 2174US7517469B2Method and system to measure flow velocity and volumeSOKUDO CO LTD·Filed 2006·Granted Apr 14, 2009·4 cites·14 claims
- 2274US7288746B2Integrated thermal unit having laterally adjacent bake and chill plates on different planesSOKUDO CO LTD·Filed 2005·Granted Oct 30, 2007·4 cites·27 claims
- 2373US9368383B2Substrate treating apparatus with substrate reorderingSOKUDO CO LTD·Filed 2014·Granted Jun 14, 2016·2 cites·15 claims
- 2472US7935948B2Method and apparatus for monitoring and control of suck back level in a photoresist dispense systemSOKUDO CO LTD·Filed 2007·Granted May 3, 2011·4 cites·12 claims
- 2570US8383990B2Substrate transport apparatus and heat treatment apparatusSOKUDO CO LTD·Filed 2008·Granted Feb 26, 2013·3 cites·11 claims
- 2670US8031324B2Substrate processing apparatus with integrated cleaning unitSOKUDO CO LTD·Filed 2008·Granted Oct 4, 2011·3 cites·8 claims
- 2768US8040488B2Substrate processing apparatusSOKUDO CO LTD·Filed 2005·Granted Oct 18, 2011·3 cites·12 claims
- 2867US7914202B2First detecting sheet and first thermometric system for detecting and measuring temperature of an object under test, second detecting sheet and second thermometric system for detecting and measuring temperature of a dummy substrate, and heat treatment apparatus using sameSOKUDO CO LTD·Filed 2007·Granted Mar 29, 2011·2 cites·9 claims
- 2966US8015985B2Substrate processing apparatus and substrate processing method using the sameSOKUDO CO LTD·Filed 2009·Granted Sep 13, 2011·2 cites·5 claims
- 3065US7766565B2Substrate drying apparatus, substrate cleaning apparatus and substrate processing systemSOKUDO CO LTD·Filed 2006·Granted Aug 3, 2010·2 cites·13 claims
- 3165US7726891B2Substrate processing apparatus and substrate processing methodSOKUDO CO LTD·Filed 2005·Granted Jun 1, 2010·2 cites·10 claims
- 3264US7460972B2Methods and systems for performing real-time wireless temperature measurement for semiconductor substratesSOKUDO CO LTD·Filed 2007·Granted Dec 2, 2008·6 cites·17 claims
- 3363US7831135B2Method and system for controlling bake plate temperature in a semiconductor processing chamberSOKUDO CO LTD·Filed 2007·Granted Nov 9, 2010·1 cites·5 claims
- 3462US7722267B2Substrate processing apparatusSOKUDO CO LTD·Filed 2007·Granted May 25, 2010·1 cites·10 claims
- 3560US2008223293A1Cluster tool architecture for processing a substrateSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 3660US2008296316A1Coat/develop module with shared dispenseSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 3756US2009103960A1Developing apparatusSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 3855US7396412B2Coat/develop module with shared dispenseSOKUDO CO LTD·Filed 2005·Granted Jul 8, 2008·0 cites·16 claims
- 3954US2009165711A1Substrate treating apparatus with substrate reorderingSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 4054US2008226830A1Method and system for removal of films from peripheral portions of a substrateSOKUDO CO LTD·Filed 2007·Application pending·0 cites
- 4153US10109513B2Substrate treating apparatusSOKUDO CO LTD·Filed 2013·Granted Oct 23, 2018·0 cites·19 claims
- 4253US7500781B1Method and apparatus for detecting substrate temperature in a track lithography toolSOKUDO CO LTD·Filed 2007·Granted Mar 10, 2009·1 cites·18 claims
- 4353US2010081097A1Substrate processing apparatusSOKUDO CO LTD·Filed 2009·Application pending·0 cites
- 4453US2009032522A1Zone control heater plate for track lithography systemsSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 4553US2009275149A1Methods and systems for controlling critical dimensions in track lithography toolsSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 4650US7567885B2Method and system for determining object heightSOKUDO CO LTD·Filed 2007·Granted Jul 28, 2009·1 cites·24 claims
- 4748US2009139833A1Multi-line substrate treating apparatusSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 4848US2009070946A1Apparatus for and method of processing substrateSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 4947US2009014126A1Substrate processing apparatus and substrate processing methodSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 5047US2010136257A1Substrate processing apparatusSOKUDO CO LTD·Filed 2010·Application pending·0 cites
Showing the top 50 of 77 patent records by PatentIndex Score.
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