Cluster tool architecture for processing a substrate

Abstract

A cluster tool for processing a substrate includes a cassette and a processing module including a first process chamber that is configured to perform a chill process on a substrate, a second processing chamber that is configured to perform a bake process on the substrate, and an input chamber. The first processing chamber, the second processing chamber, and the input chamber are substantially adjacent to each other. The processing modules also includes a robot that is configured to receive the substrate in the input chamber and transfer and position the substrate in the first processing chamber and second processing chamber. The robot includes a robot blade, an actuator, and a heat exchanging device. The heat exchanging device includes a chilled transfer assembly. The cluster tool also includes a 6-axis articulated robot configured to transfer the substrate between the cassette and the input chamber.

1 . A cluster tool for processing a substrate, the cluster tool comprising:
 a cassette that is adapted to contain two or more substrates;   a first processing chamber that is adapted to perform a first process on a substrate;   a second processing chamber that is adapted to perform a second process on a substrate,
 wherein the first processing chamber and the second processing chamber are generally adjacent to each other; and 
   a fluid dispensing means that is adapted to fluidly communicate with a first substrate positioned in the first processing chamber and a second substrate positioned in the second processing chamber,   wherein the fluid dispensing means comprises:
 a fluid source; 
 a nozzle that is in fluid communication with the fluid source; 
 a fluid delivery means that is adapted to deliver fluid from the fluid source to the nozzle; 
 a moveable shutter adapted to isolate the first processing chamber from the second processing chamber; and 
 a robot adapted to transfer a substrate between the cassette, the first processing chamber and the second processing chamber. 
   
   
   
       2 . The apparatus of  claim 1  further comprising a central fluid dispense bank comprising a plurality of dispense nozzles coupled to a plurality of fluid sources. 
   
   
       3 . The apparatus of  claim 2  wherein the central fluid dispense bank is disposed between the first and second processing chamber. 
   
   
       4 . The apparatus of  claim 2  wherein the plurality of dispense nozzles are arrayed in a two-dimensional pattern. 
   
   
       5 . The apparatus of  claim 1  wherein the fluid dispensing means further comprises:
 a dispense arm assembly configured to pickup and transfer at least one nozzle to a first position in the first processing chamber and a second position in the second processing chamber.   
   
   
       6 . The apparatus of  claim 5  wherein the dispense arm assembly comprises:
 a nozzle holding assembly configured to hold at least one nozzle;   an actuator coupled with the nozzle holding assembly; and   a guide rail coupled with the actuator and adapted to enable the actuator to translate in a longitudinal axis between the first and second processing chambers.   
   
   
       7 . The apparatus of  claim 1  wherein the first processing chamber comprises a first spin chuck adapted to hold and rotate a first substrate and the second processing chamber comprises a second spin chuck adapted to hold and rotate a second substrate. 
   
   
       8 . The apparatus of  claim 7  wherein a support surface of the first spin chuck and a support surface of the second spin chuck are positioned in substantially the same horizontal plane. 
   
   
       9 . A cluster tool for processing a substrate, comprising:
 a first processing chamber that is adapted to perform a first process on a substrate;   a second processing chamber that is adapted to perform a second process on a substrate,   a central fluid dispense bank comprising a plurality of nozzles in fluid communication with one or more fluid sources; wherein the central fluid dispense bank is flanked by the first processing chamber on a first side and by the second processing chamber on a second side opposite to the first side; and   a fluid dispensing means that is adapted to fluidly communicate with a first substrate positioned in the first processing chamber, a second substrate positioned in the second processing chamber, and the central fluid dispense bank;   wherein the fluid dispensing means comprises:
 a dispense arm configured to hold at least one of the plurality of nozzles; 
 an actuator coupled with the dispense arm; 
 a guide rail coupled with the actuator to enable the dispense arm to translate in a longitudinal direction; and 
 a moveable shutter adapted to isolate the first processing chamber from the second processing chamber.