Inventor · disambiguated record
Rick J. Roberts
Also filed as: ROBERTS RICK · ROBERTS RICK J
19 granted patents·7 pending applications·600 citations·filing 1999–2012
96Inventor score
Top patents by PatentIndex Score
26 records- 0198US7925377B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 12, 2011·45 cites·3 claims
- 0298US7743728B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2008·Granted Jun 29, 2010·36 cites·16 claims
- 0398US7694647B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 13, 2010·42 cites·19 claims
- 0498US7357842B2Cluster tool architecture for processing a substrateSOKUDO CO LTD·Filed 2005·Granted Apr 15, 2008·106 cites·11 claims
- 0597US7256139B2Methods and apparatus for e-beam treatment used to fabricate integrated circuit devicesAPPLIED MATERIALS INC·Filed 2005·Granted Aug 14, 2007·46 cites·19 claims
- 0697US6936551B2Methods and apparatus for E-beam treatment used to fabricate integrated circuit devicesAPPLIED MATERIALS INC·Filed 2003·Granted Aug 30, 2005·52 cites·36 claims
- 0796US8146530B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Apr 3, 2012·22 cites·8 claims
- 0895US8550031B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2012·Granted Oct 8, 2013·13 cites·10 claims
- 0994US8215262B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Jul 10, 2012·15 cites·9 claims
- 1094US8181596B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted May 22, 2012·15 cites·20 claims
- 1191US7381052B2Apparatus and method for heating substratesAPPLIED MATERIALS INC·Filed 2006·Granted Jun 3, 2008·14 cites·7 claims
- 1290US6693050B1Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniquesAPPLIED MATERIALS INC·Filed 2003·Granted Feb 17, 2004·56 cites·19 claims
- 1387US7166524B2Method for ion implanting insulator material to reduce dielectric constantAPPLIED MATERIALS INC·Filed 2004·Granted Jan 23, 2007·46 cites·38 claims
- 1484US6559071B2Process for producing dielectric thin filmsALLIED SIGNAL INC·Filed 2001·Granted May 6, 2003·21 cites·21 claims
- 1579US6372666B1Process for producing dielectric thin filmsALLIED SIGNAL INC·Filed 1999·Granted Apr 16, 2002·40 cites·13 claims
- 1675US7431585B2Apparatus and method for heating substratesAPPLIED MATERIALS INC·Filed 2002·Granted Oct 7, 2008·14 cites·33 claims
- 1764US6878644B2Multistep cure technique for spin-on-glass filmsAPPLIED MATERIALS INC·Filed 2003·Granted Apr 12, 2005·9 cites·16 claims
- 1860US2012180983A1Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2012·Application pending·0 cites
- 1960US2008223293A1Cluster tool architecture for processing a substrateSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 2059US6992024B2Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniquesAPPLIED MATERIALS INC·Filed 2003·Granted Jan 31, 2006·7 cites·21 claims
- 2156US2007275569A1Methods and apparatus for e-beam treatment used to fabricate integrated circuit devicesMOGHADAM FARHAD·Filed 2007·Application pending·0 cites
- 2247US6895776B2Anti-stratification-solution delivery system for spin-on dielectricsAPPLIED MATERIALS INC·Filed 2003·Granted May 24, 2005·1 cites·41 claims
- 2344US2004069410A1Cluster tool for E-beam treated filmsFiled 2003·Application pending·0 cites
- 2443US2007042580A1Ion implanted insulator material with reduced dielectric constantAL-BAYATI AMIR·Filed 2006·Application pending·0 cites
- 2539US2004266123A1Electron beam treatment of SixNy filmsAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 2638US2004020601A1Process and an integrated tool for low k dielectric deposition including a pecvd capping moduleAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →