Inventor

OBIKANE TADASHI

JP18 patents

⚠️ This page may combine multiple inventors who share the name “OBIKANE TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OBIKANE TADASHI

TOKYO ELECTRON LTD

Semiconductor wafer probing apparatus

Load port capable of coping with different types of cassette containing substrates to be processed

Probing apparatus and head plate opening/closing force-reducing mechanism

Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer

Electric probing test machine

Probing apparatus and probing method

Wafer carrying-in/out machine

Probe apparatus

Processing apparatus

Probe apparatus

Wafer carrying-in/out apparatus

Test device, change kit, and method of exchanging change kit

Wafer carrying-in/out apparatus

Processing apparatus and substrate transfer method with first and second suction paths

OBIKANE TADASHI

FOUP opening/closing device and probe apparatus

Transfer and inspection devices of object to be inspected

Probe apparatus and substrate transfer method

HOSAKA HIROKI

Probing apparatus and probing method