Inventor
BANGALORE UMESH SUHAS
US7 patents
Patents
7 patentsUSD1038901SAug 13, 2024
Collimator for a physical vapor deposition chamber
APPLIED MATERIALS INC5 citations83
USD1110975SFeb 3, 2026
Collimator for a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC0 citations60
US11492699B2Nov 8, 2022
Substrate temperature non-uniformity reduction over target life using spacing compensation
APPLIED MATERIALS INC0 citations59
US12027352B2Jul 2, 2024
Apparatus for generating magnetic fields on substrates during semiconductor processing
APPLIED MATERIALS INC0 citations49
US11952655B2Apr 9, 2024
Electromagnet pulsing effect on PVD step coverage
APPLIED MATERIALS INC0 citations49
US11915915B2Feb 27, 2024
Apparatus for generating magnetic fields during semiconductor processing
APPLIED MATERIALS INC0 citations49
US12203163B2Jan 21, 2025
Methods for shaping magnetic fields during semiconductor processing
APPLIED MATERIALS INC0 citations47