Inventor · disambiguated record
Jason Kirkwood
Also filed as: KIRKWOOD JASON · KIRKWOOD JASON C
13 granted patents·1 pending application·78 citations·filing 2003–2024
89Inventor score
Top patents by PatentIndex Score
14 records- 0193US8223327B2Systems and methods for detecting defects on a waferCHEN LU·Filed 2009·Granted Jul 17, 2012·24 cites·24 claims
- 0287US10605744B2Systems and methods for detecting defects on a waferKLA TENCOR CORP·Filed 2018·Granted Mar 31, 2020·3 cites·3 claims
- 0386US9880107B2Systems and methods for detecting defects on a waferKLA TENCOR CORP·Filed 2013·Granted Jan 30, 2018·5 cites·44 claims
- 0485US8467047B2Systems and methods for detecting defects on a waferCHEN LU·Filed 2012·Granted Jun 18, 2013·5 cites·17 claims
- 0585US6966402B2Acoustical heat shieldDANA CORP·Filed 2003·Granted Nov 22, 2005·37 cites·22 claims
- 0673US10067072B2Methods and apparatus for speckle suppression in laser dark-field systemsKLA TENCOR CORP·Filed 2016·Granted Sep 4, 2018·2 cites·20 claims
- 0771US12444174B2Rare event training data sets for robust training of semiconductor yield related componentsKLA CORP·Filed 2023·Granted Oct 14, 2025·0 cites·23 claims
- 0870US10854486B2System and method for characterization of buried defectsKLA TENCOR CORP·Filed 2018·Granted Dec 1, 2020·1 cites·29 claims
- 0965US8049877B2Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection systemKLA TENCOR CORP·Filed 2008·Granted Nov 1, 2011·1 cites·21 claims
- 1060US2025336181A1Combining deep learning model hidden layer output with specimen-specific input for defect classification or another semiconductor applicationKLA CORP·Filed 2024·Application pending·0 cites
- 1156US12100132B2Laser anneal pattern suppressionKLA CORP·Filed 2021·Granted Sep 24, 2024·0 cites·16 claims
- 1256US11774371B2Defect size measurement using deep learning methodsKLA CORP·Filed 2020·Granted Oct 3, 2023·0 cites·20 claims
- 1338US9360863B2Data perturbation for wafer inspection or metrology setup using a model of a differenceTHATTAISUNDARAM GOVIND·Filed 2011·Granted Jun 7, 2016·0 cites·39 claims
- 1436US9053390B2Automated inspection scenario generationMAHADEVAN MOHAN·Filed 2012·Granted Jun 9, 2015·0 cites·17 claims
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