Inventor · disambiguated record
Daisuke Matsushima
Also filed as: MATSUSHIMA DAISUKE
12 granted patents·6 pending applications·6 citations·filing 2010–2021
82Inventor score
Top patents by PatentIndex Score
18 records- 0190US12097541B2Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Sep 24, 2024·2 cites·20 claims
- 0279US9586391B2Bonding apparatus and method for manufacturing bonded substrateSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Mar 7, 2017·3 cites·16 claims
- 0369US10734217B2Substrate treatment device and substrate treatment methodSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Aug 4, 2020·1 cites·6 claims
- 0465US11609491B2Reflective mask cleaning apparatus and reflective mask cleaning methodSHIBAURA MECHATRONICS CORP·Filed 2019·Granted Mar 21, 2023·0 cites·4 claims
- 0563US11355337B2Substrate treatment device and substrate treatment methodSHIBAURA MECHATRONICS CORP·Filed 2020·Granted Jun 7, 2022·0 cites·7 claims
- 0654US11784040B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Oct 10, 2023·0 cites·20 claims
- 0752US10773425B2Imprint template manufacturing apparatus and imprint template manufacturing methodSHIBAURA MECHATRONICS CORP·Filed 2018·Granted Sep 15, 2020·0 cites·5 claims
- 0850US12165886B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Dec 10, 2024·0 cites·14 claims
- 0948US12138671B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Nov 12, 2024·0 cites·9 claims
- 1048US2017017151A1Reflective mask cleaning apparatus and reflective mask cleaning methodSHIBAURA MECHATRONICS CORP·Filed 2015·Application pending·0 cites
- 1147US12005482B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Jun 11, 2024·0 cites·5 claims
- 1247US10668496B2Imprint template treatment apparatusSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Jun 2, 2020·0 cites·11 claims
- 1346US12109597B2Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Oct 8, 2024·0 cites·8 claims
- 1440US2018117796A1Imprint template manufacturing apparatus and imprint template manufacturing methodSHIBAURA MECHATRONICS CORP·Filed 2018·Application pending·0 cites
- 1538US2018022016A1Template for imprintSHIBAURA MECHATRONICS CORP·Filed 2017·Application pending·0 cites
- 1636US2018016673A1Imprint template manufacturing apparatusSHIBAURA MECHATRONICS CORP·Filed 2017·Application pending·0 cites
- 1735US2012192953A1Plasma processing apparatus and plasma processing methodMATSUSHIMA DAISUKE·Filed 2010·Application pending·0 cites
- 1833US2012132617A1Plasma etching apparatus and plasma etching methodMATSUSHIMA DAISUKE·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →