Inventor · disambiguated record
Dan Marohl
Also filed as: MAROHL DAN · MAROHL DAN A · STEVENS JOSEPH
45 granted patents·22 pending applications·1,590 citations·filing 1992–2024
98Inventor score
Top patents by PatentIndex Score
67 records- 0198US6258220B1Electro-chemical deposition systemAPPLIED MATERIALS INC·Filed 1999·Granted Jul 10, 2001·443 cites·26 claims
- 0295US12334385B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2024·Granted Jun 17, 2025·1 cites·10 claims
- 0394US5746460AEnd effector for semiconductor wafer transfer device and method of moving a wafer with an end effectorAPPLIED MATERIALS INC·Filed 1995·Granted May 5, 1998·164 cites·9 claims
- 0493US5860640ASemiconductor wafer alignment member and clamp ringAPPLIED MATERIALS INC·Filed 1995·Granted Jan 19, 1999·142 cites·33 claims
- 0592US10109460B2Universal non-invasive chamber impedance measurement system and associated methodsLAM RES CORP·Filed 2016·Granted Oct 23, 2018·12 cites·19 claims
- 0691US6635157B2Electro-chemical deposition systemAPPLIED MATERIALS INC·Filed 2001·Granted Oct 21, 2003·43 cites·68 claims
- 0790US6409453B1End effector for wafer handler in processing systemAPPLIED MATERIALS INC·Filed 2000·Granted Jun 25, 2002·73 cites·16 claims
- 0889US7677958B2Retaining ring with flange for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2006·Granted Mar 16, 2010·11 cites·9 claims
- 0989US6503131B1Integrated platen assembly for a chemical mechanical planarization systemAPPLIED MATERIALS INC·Filed 2001·Granted Jan 7, 2003·31 cites·40 claims
- 1088US7094139B2Retaining ring with flange for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2003·Granted Aug 22, 2006·32 cites·11 claims
- 1188US6267423B1End effector for semiconductor wafer transfer device and method of moving a wafer with an end effectorAPPLIED MATERIALS INC·Filed 2000·Granted Jul 31, 2001·40 cites·15 claims
- 1287US7497932B2Electro-chemical deposition systemAPPLIED MATERIALS INC·Filed 2006·Granted Mar 3, 2009·9 cites·4 claims
- 1387US6263587B1Degassing method using simultaneous dry gas flux pressure and vacuumAPPLIED MATERIALS INC·Filed 2000·Granted Jul 24, 2001·33 cites·19 claims
- 1484US10923322B2Articulated direct-mount inductor and associated systems and methodsLAM RES CORP·Filed 2017·Granted Feb 16, 2021·3 cites·16 claims
- 1584US5401319ALid and door for a vacuum chamber and pretreatment thereforAPPLIED MATERIALS INC·Filed 1992·Granted Mar 28, 1995·69 cites·4 claims
- 1683US5762748ALid and door for a vacuum chamber and pretreatment thereforAPPLIED MATERIALS INC·Filed 1996·Granted Jun 9, 1998·56 cites·1 claims
- 1782US5833426AMagnetically coupled wafer extraction platformAPPLIED MATERIALS INC·Filed 1996·Granted Nov 10, 1998·64 cites·28 claims
- 1881US9472435B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Oct 18, 2016·2 cites·18 claims
- 1981US8322045B2Single wafer apparatus for drying semiconductor substrates using an inert gas air-knifeSTEIN NATHAN D·Filed 2008·Granted Dec 4, 2012·10 cites·20 claims
- 2081US7774887B2Scrubber box and methods for using the sameAPPLIED MATERIALS INC·Filed 2008·Granted Aug 17, 2010·6 cites·10 claims
- 2181US6113698ADegassing method and apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Sep 5, 2000·54 cites·17 claims
- 2280US7377002B2Scrubber boxAPPLIED MATERIALS INC·Filed 2004·Granted May 27, 2008·20 cites·5 claims
- 2378US10820378B2Consolidated filter arrangement for devices in an RF environmentAPPLIED MATERIALS INC·Filed 2018·Granted Oct 27, 2020·2 cites·20 claims
- 2478US7934979B2Retaining ring with tapered inner surfaceAPPLIED MATERIALS INC·Filed 2010·Granted May 3, 2011·3 cites·15 claims
- 2577US6568896B2Transfer chamber with side wall portAPPLIED MATERIALS INC·Filed 2001·Granted May 27, 2003·20 cites·21 claims
- 2676US5964561ACompact apparatus and method for storing and loading semiconductor wafer carriersAPPLIED MATERIALS INC·Filed 1996·Granted Oct 12, 1999·50 cites·23 claims
- 2774US9872341B2Consolidated filter arrangement for devices in an RF environmentAPPLIED MATERIALS INC·Filed 2014·Granted Jan 16, 2018·3 cites·11 claims
- 2873US10490429B2Substrate carrier using a proportional thermal fluid delivery systemAPPLIED MATERIALS INC·Filed 2014·Granted Nov 26, 2019·2 cites·14 claims
- 2972US2025054738A1Tunable esc for rapid alternating process applicationsLAM RES CORP·Filed 2024·Application pending·0 cites
- 3071US6034863AApparatus for retaining a workpiece in a process chamber within a semiconductor wafer processing systemAPPLIED MATERIALS INC·Filed 1997·Granted Mar 7, 2000·42 cites·28 claims
- 3171US5725718AClamp ring for domed heated pedestal in wafer processing chamberAPPLIED MATERIALS INC·Filed 1994·Granted Mar 10, 1998·44 cites·16 claims
- 3270US12009244B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2020·Granted Jun 11, 2024·0 cites·15 claims
- 3367US11870252B2Consolidated filter arrangement for devices in an RF environmentAPPLIED MATERIALS INC·Filed 2020·Granted Jan 9, 2024·0 cites·20 claims
- 3465US2025178210A1Collaborative robot system on a mobile cart with a chamber docking systemLAM RES CORP·Filed 2024·Application pending·0 cites
- 3564US5697427AApparatus and method for cooling a substrateAPPLIED MATERIALS INC·Filed 1995·Granted Dec 16, 1997·29 cites·15 claims
- 3664US5565058ALid and door for a vacuum chamber and pretreatment thereforAPPLIED MATERIALS INC·Filed 1994·Granted Oct 15, 1996·27 cites·1 claims
- 3763US12087557B2Substrate processing system including coil with RF powered faraday shieldLAM RES CORP·Filed 2020·Granted Sep 10, 2024·0 cites·7 claims
- 3863US6182376B1Degassing method and apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Feb 6, 2001·27 cites·12 claims
- 3963US5929373AHigh voltage feed throughAPPLIED MATERIALS INC·Filed 1997·Granted Jul 27, 1999·18 cites·23 claims
- 4060US11615973B2Substrate carrier using a proportional thermal fluid delivery systemAPPLIED MATERIALS INC·Filed 2019·Granted Mar 28, 2023·0 cites·7 claims
- 4158US10535544B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2016·Granted Jan 14, 2020·0 cites·11 claims
- 4258US8318609B2Method of depositing materials on a non-planar surfaceMAROHL DAN·Filed 2009·Granted Nov 27, 2012·1 cites·11 claims
- 4356US12186887B2Collaborative robot system on a mobile cart with a chamber docking systemLAM RES CORP·Filed 2021·Granted Jan 7, 2025·0 cites·27 claims
- 4456US10820377B2Consolidated filter arrangement for devices in an RF environmentAPPLIED MATERIALS INC·Filed 2018·Granted Oct 27, 2020·0 cites·20 claims
- 4554US2025349511A1Window Edge Heater for High Power Plasma Processing ApplicationsLAM RES CORP·Filed 2023·Application pending·0 cites
- 4653US6837964B2Integrated platen assembly for a chemical mechanical planarization systemAPPLIED MATERIALS INC·Filed 2002·Granted Jan 4, 2005·4 cites·22 claims
- 4753US2009011573A1Carrier used for deposition of materials on a non-planar surfaceSOLYNDRA INC·Filed 2007·Application pending·0 cites
- 4853US2023071933A1Planar multi-layer radio frequency filters including stacked coils with structural capacitanceLAM RES CORP·Filed 2021·Application pending·0 cites
- 4952US2025191838A1Balun transformer with enhanced rf coupling embedded in high-strength dielectric materialsLAM RES CORP·Filed 2023·Application pending·0 cites
- 5051US2024162010A1Adjustable dielectric constant ceramic windowLAM RES CORP·Filed 2022·Application pending·0 cites
Showing the top 50 of 67 patent records by PatentIndex Score.
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