Inventor · disambiguated record
Oleh Khodykin
Also filed as: KHODYKIN OLEH · KHODYKIN OLEH V
24 granted patents·2 pending applications·1,035 citations·filing 2002–2012
97Inventor score
Top patents by PatentIndex Score
26 records- 0198US7671349B2Laser produced plasma EUV light sourceCYMER INC·Filed 2007·Granted Mar 2, 2010·54 cites·32 claims
- 0298US7491954B2Drive laser delivery systems for EUV light sourceCYMER INC·Filed 2006·Granted Feb 17, 2009·84 cites·60 claims
- 0398US7439530B2LPP EUV light source drive laser systemCYMER INC·Filed 2005·Granted Oct 21, 2008·76 cites·44 claims
- 0498US7372056B2LPP EUV plasma source material target delivery systemCYMER INC·Filed 2005·Granted May 13, 2008·109 cites·21 claims
- 0597US7872245B2Systems and methods for target material delivery in a laser produced plasma EUV light sourceCYMER INC·Filed 2008·Granted Jan 18, 2011·90 cites·25 claims
- 0697US6972421B2Extreme ultraviolet light sourceCYMER INC·Filed 2003·Granted Dec 6, 2005·141 cites·78 claims
- 0796US7368741B2Extreme ultraviolet light sourceCYMER INC·Filed 2005·Granted May 6, 2008·65 cites·78 claims
- 0895US7642533B2Extreme ultraviolet light sourceCYMER INC·Filed 2007·Granted Jan 5, 2010·36 cites·20 claims
- 0995US6815700B2Plasma focus light source with improved pulse power systemCYMER INC·Filed 2002·Granted Nov 9, 2004·113 cites·40 claims
- 1094US7109503B1Systems for protecting internal components of an EUV light source from plasma-generated debrisCYMER INC·Filed 2005·Granted Sep 19, 2006·25 cites·20 claims
- 1193US7378673B2Source material dispenser for EUV light sourceCYMER INC·Filed 2006·Granted May 27, 2008·43 cites·20 claims
- 1292US8035092B2Laser produced plasma EUV light sourceCYMER INC·Filed 2010·Granted Oct 11, 2011·7 cites·19 claims
- 1392US7465946B2Alternative fuels for EUV light sourceCYMER INC·Filed 2006·Granted Dec 16, 2008·40 cites·32 claims
- 1491US8461560B2LPP EUV light source drive laser systemERSHOV ALEXANDER I·Filed 2011·Granted Jun 11, 2013·9 cites·24 claims
- 1591US7482609B2LPP EUV light source drive laser systemCYMER INC·Filed 2005·Granted Jan 27, 2009·37 cites·43 claims
- 1689US7589337B2LPP EUV plasma source material target delivery systemCYMER INC·Filed 2008·Granted Sep 15, 2009·23 cites·11 claims
- 1788US7365349B2EUV light source collector lifetime improvementsCYMER INC·Filed 2005·Granted Apr 29, 2008·23 cites·24 claims
- 1882US7732793B2Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light sourceCYMER INC·Filed 2007·Granted Jun 8, 2010·14 cites·7 claims
- 1981US7928417B2LPP EUV light source drive laser systemCYMER INC·Filed 2008·Granted Apr 19, 2011·11 cites·20 claims
- 2077US8686370B2EUV light source components and methods for producing, using and refurbishing sameCYMER INC·Filed 2012·Granted Apr 1, 2014·3 cites·20 claims
- 2176US7960701B2EUV light source components and methods for producing, using and refurbishing sameCYMER INC·Filed 2007·Granted Jun 14, 2011·8 cites·16 claims
- 2275US7180081B2Discharge produced plasma EUV light sourceCYMER INC·Filed 2003·Granted Feb 20, 2007·16 cites·36 claims
- 2368US8314398B2EUV light source components and methods for producing, using and refurbishing sameBOWERING NORBERT R·Filed 2011·Granted Nov 20, 2012·2 cites·23 claims
- 2465US7402825B2LPP EUV drive laser input systemCYMER INC·Filed 2005·Granted Jul 22, 2008·6 cites·71 claims
- 2543US2010176313A1Extreme ultraviolet light sourceCYMER INC·Filed 2009·Application pending·0 cites
- 2636US2006255298A1Laser produced plasma EUV light source with pre-pulseCYMER INC·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →