Inventor · disambiguated record
Kailash Kiran Patalay
Also filed as: PATALAY KAILASH · PATALAY KAILASH K · PATALAY KAILASH KIRAN
23 granted patents·6 pending applications·744 citations·filing 2006–2017
96Inventor score
Top patents by PatentIndex Score
29 records- 0197US8726837B2Semiconductor process chamber vision and monitoring systemPATALAY KAILASH K·Filed 2008·Granted May 20, 2014·553 cites·20 claims
- 0295US10376916B2Substrate processing system having susceptorless substrate support with enhanced substrate heating controlAPPLIED MATERIALS INC·Filed 2017·Granted Aug 13, 2019·10 cites·12 claims
- 0394US8398777B2System and method for pedestal adjustmentCOLLINS RICHARD O·Filed 2008·Granted Mar 19, 2013·45 cites·7 claims
- 0491US8441640B2Non-contact substrate support position sensing system and corresponding adjustmentsPATALAY KAILASH KIRAN·Filed 2008·Granted May 14, 2013·19 cites·20 claims
- 0591US7976634B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 12, 2011·18 cites·15 claims
- 0690US8150242B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2008·Granted Apr 3, 2012·14 cites·16 claims
- 0788US8663390B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsCARLSON DAVID KEITH·Filed 2011·Granted Mar 4, 2014·12 cites·21 claims
- 0888US7964038B2Apparatus for improved azimuthal thermal uniformity of a substrateAPPLIED MATERIALS INC·Filed 2008·Granted Jun 21, 2011·18 cites·16 claims
- 0987US8147137B2Pyrometry for substrate processingPATALAY KAILASH KIRAN·Filed 2008·Granted Apr 3, 2012·12 cites·25 claims
- 1086US8512472B2Method and apparatus to enhance process gas temperature in a CVD reactorVATUS JEAN R·Filed 2008·Granted Aug 20, 2013·9 cites·14 claims
- 1184US8852349B2Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defectsCHACIN JUAN·Filed 2006·Granted Oct 7, 2014·12 cites·40 claims
- 1282US9768043B2Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2013·Granted Sep 19, 2017·4 cites·19 claims
- 1376US8724976B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2012·Granted May 13, 2014·3 cites·20 claims
- 1475US8951351B2Wafer processing hardware for epitaxial deposition with reduced backside deposition and defectsPATALAY KAILASH KIRAN·Filed 2007·Granted Feb 10, 2015·5 cites·20 claims
- 1572US8747560B2System and method for pedestal adjustmentAPPLIED MATERIALS INC·Filed 2013·Granted Jun 10, 2014·2 cites·8 claims
- 1671US9832816B2Absorbing reflector for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2014·Granted Nov 28, 2017·2 cites·11 claims
- 1769US9570328B2Substrate support for use with multi-zonal heating sourcesPATALAY KAILASH·Filed 2011·Granted Feb 14, 2017·3 cites·20 claims
- 1867US9682398B2Substrate processing system having susceptorless substrate support with enhanced substrate heating controlAPPLIED MATERIALS INC·Filed 2013·Granted Jun 20, 2017·1 cites·14 claims
- 1965US8967860B2Low temperature measurement and control using low temperature pyrometryPATALAY KAILASH KIRAN·Filed 2011·Granted Mar 3, 2015·2 cites·17 claims
- 2058US10345155B2Model based lamp background filtration of stray radiation for pyrometryAPPLIED MATERIALS INC·Filed 2017·Granted Jul 9, 2019·0 cites·24 claims
- 2157US10610884B2Substrate processing system having susceptorless substrate support with enhanced substrate heating controlAPPLIED MATERIALS INC·Filed 2016·Granted Apr 7, 2020·0 cites·19 claims
- 2255US9739666B2Model based lamp background filtration of stray radiation for pyrometryAPPLIED MATERIALS INC·Filed 2014·Granted Aug 22, 2017·0 cites·15 claims
- 2354US2014345526A1Coated liner assembly for a semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2454US2014345525A1Coated liner assembly for a semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2554US2017362702A9Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature cvd systemsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2652US10306708B2Absorbing reflector for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted May 28, 2019·0 cites·20 claims
- 2750US2018005856A1Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2848US2012270384A1Apparatus for deposition of materials on a substrateSANCHEZ ERROL ANTONIO C·Filed 2011·Application pending·0 cites
- 2944US2010075488A1Cvd reactor with multiple processing levels and dual-axis motorized lift mechanismAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
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