Inventor · disambiguated record
Thuc M. Dinh
Also filed as: DINH THUC · DINH THUC M
13 granted patents·6 pending applications·626 citations·filing 2008–2017
91Inventor score
Top patents by PatentIndex Score
19 records- 0197US8711338B2Apparatus for counting particles in a gasLIU BENJAMIN Y H·Filed 2012·Granted Apr 29, 2014·550 cites·10 claims
- 0295US8465791B2Method for counting particles in a gasLIU BENJAMIN Y H·Filed 2010·Granted Jun 18, 2013·21 cites·10 claims
- 0391US8603247B2Apparatus for counting particles in a gasMSP CORP·Filed 2013·Granted Dec 10, 2013·8 cites·6 claims
- 0491US8511583B2Fine droplet atomizer for liquid precursor vaporizationLIU BENJAMIN Y H·Filed 2011·Granted Aug 20, 2013·5 cites·4 claims
- 0589US8297223B2Method and apparatus for particle filtration and enhancing tool performance in film depositionLIU BENJAMIN·Filed 2008·Granted Oct 30, 2012·15 cites·4 claims
- 0684US8783652B2Liquid flow control for film depositionDINH THUC M·Filed 2013·Granted Jul 22, 2014·9 cites·13 claims
- 0780US8554064B1Method and apparatus for generating vapor at high ratesDINH THUC·Filed 2011·Granted Oct 8, 2013·17 cites·12 claims
- 0866US8945281B1Method and apparatus for vapor generation and wafer cleaningMSP CORP·Filed 2014·Granted Feb 3, 2015·1 cites·22 claims
- 0955US8986784B2Fine droplet atomization for liquid precursor vaporizationMSP CORP·Filed 2013·Granted Mar 24, 2015·0 cites·5 claims
- 1055US2009293807A1Apparatus for filtration and gas-vapor mixing in thin film depositionMSP CORP·Filed 2009·Application pending·0 cites
- 1152US10287679B2Apparatus and method for vapor generation and film depositionMSP CORP·Filed 2017·Granted May 14, 2019·0 cites·15 claims
- 1252US2014096715A1Apparatus for filtration and gas-vapor mixing in thin film depositionMSP CORP·Filed 2013·Application pending·0 cites
- 1351US8728240B2Apparatus for vapor condensation and recoveryLIU BENJAMIN Y H·Filed 2012·Granted May 20, 2014·0 cites·4 claims
- 1451US2013295776A1Method for vapor condensation and recoveryMSP CORP·Filed 2013·Application pending·0 cites
- 1550US9089800B2Method and apparatus for vapor and gas filtrationLIU BENJAMIN Y H·Filed 2012·Granted Jul 28, 2015·0 cites·20 claims
- 1650US2013312674A1Integrated system for vapor generation and thin film depositionMSP CORP·Filed 2013·Application pending·0 cites
- 1746US2011232588A1Integrated system for vapor generation and thin film depositionMSP CORP·Filed 2011·Application pending·0 cites
- 1845US9797593B2Apparatus and method for vapor generation and film depositionMSP CORP·Filed 2015·Granted Oct 24, 2017·0 cites·15 claims
- 1939US2016091228A1Air conditioning system with vapor bypassingMSP CORP·Filed 2015·Application pending·0 cites
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