Inventor
BABU SARATH
SG16 patents
Patents
16 patentsUSD913979SMar 23, 2021
Inner shield for a substrate processing chamber
APPLIED MATERIALS INC27 citations93
USD931241SSep 21, 2021
Lower shield for a substrate processing chamber
APPLIED MATERIALS INC5 citations83
US10851453B2Dec 1, 2020
Methods and apparatus for shutter disk assembly detection
APPLIED MATERIALS INC11 citations81
USD973609SDec 27, 2022
Upper shield with showerhead for a process chamber
APPLIED MATERIALS INC5 citations71
US11251028B2Feb 15, 2022
Pre-clean chamber with integrated shutter garage
APPLIED MATERIALS INC4 citations71
US12148629B2Nov 19, 2024
Shutter disk
APPLIED MATERIALS INC0 citations62
US11862480B2Jan 2, 2024
Shutter disk
APPLIED MATERIALS INC0 citations62
USD971167SNov 29, 2022
Lower shield for a substrate processing chamber
APPLIED MATERIALS INC0 citations62
US11043406B2Jun 22, 2021
Two piece shutter disk assembly with self-centering feature
APPLIED MATERIALS INC1 citations62
US11476097B2Oct 18, 2022
Common electrostatic chuck for differing substrates
APPLIED MATERIALS INC0 citations60
US11289357B2Mar 29, 2022
Methods and apparatus for high voltage electrostatic chuck protection
APPLIED MATERIALS INC0 citations59
US11171017B2Nov 9, 2021
Shutter disk
APPLIED MATERIALS INC0 citations59
US11881385B2Jan 23, 2024
Methods and apparatus for reducing defects in preclean chambers
APPLIED MATERIALS INC0 citations58
US12476086B2Nov 18, 2025
Spray-coated electrostatic chuck design
APPLIED MATERIALS INC0 citations51
US12100577B2Sep 24, 2024
High conductance inner shield for process chamber
APPLIED MATERIALS INC0 citations51
US12080522B2Sep 3, 2024
Preclean chamber upper shield with showerhead
APPLIED MATERIALS INC0 citations50