Inventor · disambiguated record
Risa Nakase
Also filed as: NAKASE RISA
7 granted patents·2 pending applications·150 citations·filing 1997–2003
87Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
9 records- 0186US6355902B2Plasma film forming method and plasma film forming apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Mar 12, 2002·23 cites·6 claims
- 0285US6215087B1Plasma film forming method and plasma film forming apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Apr 10, 2001·57 cites·7 claims
- 0371US6770332B2Method for forming film by plasmaTOKYO ELECTRON LTD·Filed 2000·Granted Aug 3, 2004·14 cites·17 claims
- 0468US6087614APlasma treating deviceTOKYO ELECTRON LTD·Filed 1997·Granted Jul 11, 2000·21 cites·12 claims
- 0563US6544901B1Plasma thin-film deposition methodTOKYO ELECTRON LTD·Filed 2000·Granted Apr 8, 2003·8 cites·12 claims
- 0659US6443165B1Method for cleaning plasma treatment device and plasma treatment systemTOKYO ELECTRON LTD·Filed 1997·Granted Sep 3, 2002·24 cites·3 claims
- 0739US2003152714A1Plasma thin-film deposition methodTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
- 0838US2004065344A1Processing apparatus and cleaning methodFiled 2001·Application pending·0 cites
- 0932US6320154B1Plasma processing methodTOKYO ELECTRON LTD·Filed 1997·Granted Nov 20, 2001·3 cites·5 claims
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