Inventor · disambiguated record
Herman Vogel
Also filed as: VOGEL HERMAN
40 granted patents·2 pending applications·958 citations·filing 1988–2019
98Inventor score
Files withASML HOLDING NV14ASML NETHERLANDS BV11PERKIN ELMER CORP6VOGEL HERMAN5KEMPER NICOLAAS RUDOLF3
Top patents by PatentIndex Score
42 records- 0199US6867844B2Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2003·Granted Mar 15, 2005·407 cites·40 claims
- 0297US8031325B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Oct 4, 2011·13 cites·20 claims
- 0396US7701550B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 20, 2010·45 cites·42 claims
- 0496US7602470B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 13, 2009·20 cites·21 claims
- 0595US7234514B2Methods and systems for compact, micro-channel laminar heat exchangingASML HOLDING NV·Filed 2004·Granted Jun 26, 2007·44 cites·22 claims
- 0695US4914904AOil cooler for fan jet enginesAVCO CORP·Filed 1988·Granted Apr 10, 1990·143 cites·5 claims
- 0794US7411650B2Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2005·Granted Aug 12, 2008·14 cites·20 claims
- 0893US9488923B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Nov 8, 2016·4 cites·20 claims
- 0991US8730450B2Immersion photolithography system and method using microchannel nozzlesVOGEL HERMAN·Filed 2011·Granted May 20, 2014·4 cites·20 claims
- 1090US8446563B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted May 21, 2013·6 cites·24 claims
- 1189US7375791B2Laminar flow gas curtains for lithographic applicationsASML HOLDING NV·Filed 2005·Granted May 20, 2008·14 cites·20 claims
- 1288US8670105B2Immersion photolithography system and method using microchannel nozzlesVOGEL HERMAN·Filed 2011·Granted Mar 11, 2014·3 cites·20 claims
- 1386US8004649B2Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2008·Granted Aug 23, 2011·4 cites·20 claims
- 1483US9081311B2Lithographic apparatus and device manufacturing methodVOGEL HERMAN·Filed 2012·Granted Jul 14, 2015·5 cites·20 claims
- 1581US7924399B2Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methodsASML NETHERLANDS BV·Filed 2006·Granted Apr 12, 2011·6 cites·28 claims
- 1681US7140233B2Immersion lithography proximity sensor having a nozzle shroud with flow curtainASML HOLDING NV·Filed 2006·Granted Nov 28, 2006·5 cites·4 claims
- 1781US7017390B1Proximity sensor nozzle shroud with flow curtainASML HOLDING NV·Filed 2004·Granted Mar 28, 2006·15 cites·11 claims
- 1880US9715178B2Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2014·Granted Jul 25, 2017·1 cites·20 claims
- 1979US4802823AStress relief support structures and assembliesAVCO CORP·Filed 1988·Granted Feb 7, 1989·43 cites·12 claims
- 2077US10599054B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Mar 24, 2020·0 cites·20 claims
- 2173US5671603AApparatus for controlling level of cryogenic liquidPERKIN ELMER CORP·Filed 1995·Granted Sep 30, 1997·36 cites·18 claims
- 2272US10705439B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 7, 2020·0 cites·20 claims
- 2372US5876118ACalorimeter having rapid cooling of a heating vessel thereinPERKIN ELMER CORP·Filed 1995·Granted Mar 2, 1999·38 cites·20 claims
- 2471US10331047B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 25, 2019·0 cites·20 claims
- 2569US9904185B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 27, 2018·0 cites·20 claims
- 2668US9709899B2Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2014·Granted Jul 18, 2017·0 cites·20 claims
- 2768US8210248B2Method and systems for compact, micro-channel, laminar heat exchangingVOGEL HERMAN·Filed 2007·Granted Jul 3, 2012·1 cites·30 claims
- 2866US9507278B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Nov 29, 2016·0 cites·20 claims
- 2965US9746788B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Aug 29, 2017·0 cites·20 claims
- 3063US8817230B2Immersion photolithography system and method using microchannel nozzlesVOGEL HERMAN·Filed 2012·Granted Aug 26, 2014·0 cites·20 claims
- 3163US8755028B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2011·Granted Jun 17, 2014·0 cites·23 claims
- 3263US5716082AFluid conveying device with removable connectionPERKIN ELMER CORP·Filed 1995·Granted Feb 10, 1998·28 cites·9 claims
- 3363US2017293231A1Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2017·Application pending·0 cites
- 3460US9097992B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2011·Granted Aug 4, 2015·0 cites·20 claims
- 3556US5655681AThermal insulating container for liquified gasPERKIN ELMER CORP·Filed 1996·Granted Aug 12, 1997·19 cites·25 claims
- 3652US7578168B2Increasing gas gauge pressure sensitivity using nozzle-face surface roughnessASML HOLDING NV·Filed 2007·Granted Aug 25, 2009·1 cites·30 claims
- 3751US5762381AConnecting apparatus for conveyance of cryogenic fluidPERKIN ELMER CORP·Filed 1995·Granted Jun 9, 1998·20 cites·7 claims
- 3850US7619718B2Method and system for active purging of pellicle volumesASML HOLDING NV·Filed 2003·Granted Nov 17, 2009·3 cites·25 claims
- 3947US2009073397A1Laminar Flow Gas Curtains for Lithographic ApplicationsASML HOLDING NV·Filed 2008·Application pending·0 cites
- 4046US8441610B2Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methodsVAN DER HAM RONALD·Filed 2011·Granted May 14, 2013·0 cites·20 claims
- 4146US5590537ADry gas curtain for cryogenic surfacePERKIN ELMER CORP·Filed 1995·Granted Jan 7, 1997·16 cites·3 claims
- 4244US10423081B2Reticle cooling by non-uniform gas flowASML HOLDING NV·Filed 2015·Granted Sep 24, 2019·0 cites·24 claims
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