Inventor · disambiguated record
Akira Fukunaga
Also filed as: FUKUNAGA AKIRA
40 granted patents·40 pending applications·539 citations·filing 1987–2025
98Inventor score
Top patents by PatentIndex Score
80 records- 0195US6368493B1Electrolytic machining method and apparatusMORI YUZO·Filed 2000·Granted Apr 9, 2002·35 cites·11 claims
- 0292US7285492B2Method for processing substrateEBARA CORP·Filed 2005·Granted Oct 23, 2007·21 cites·9 claims
- 0391US6558478B1Method of and apparatus for cleaning substrateEBARA CORP·Filed 2000·Granted May 6, 2003·65 cites·30 claims
- 0489US8211242B2Substrate processing method, substrate processing apparatus, and control programINOUE YUKI·Filed 2006·Granted Jul 3, 2012·15 cites·22 claims
- 0589US7055535B2Holding unit, processing apparatus and holding method of substratesEBARA CORP·Filed 2003·Granted Jun 6, 2006·38 cites·11 claims
- 0689US6602396B2Electrolytic machining method and apparatusMORI YUZO·Filed 2001·Granted Aug 5, 2003·16 cites·43 claims
- 0788US6875335B2Electrolytic machining method and apparatusMORI YUZO·Filed 2003·Granted Apr 5, 2005·15 cites·42 claims
- 0883US6517642B2Method and apparatus of producing thin film of metal or metal compoundEBARA CORP·Filed 2000·Granted Feb 11, 2003·25 cites·18 claims
- 0981US6730596B1Method of and apparatus for forming interconnectionEBARA CORP·Filed 2000·Granted May 4, 2004·19 cites·9 claims
- 1081US2025118604A1Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2024·Application pending·0 cites
- 1178US6743395B2Composite metallic ultrafine particles and process for producing the sameEBARA CORP·Filed 2001·Granted Jun 1, 2004·23 cites·4 claims
- 1277US2024087963A1Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2023·Application pending·0 cites
- 1376US7262849B2Method of polishing thin film formed on substrateEBARA CORP·Filed 2005·Granted Aug 28, 2007·5 cites·5 claims
- 1474US6315858B1Gas polishing apparatus and methodEBARA CORP·Filed 1999·Granted Nov 13, 2001·46 cites·21 claims
- 1573US6972256B2Method and apparatus for forming thin film of metalEBARA CORP·Filed 2000·Granted Dec 6, 2005·17 cites·8 claims
- 1673US6519842B2Method for mounting semiconductor deviceEBARA CORP·Filed 2000·Granted Feb 18, 2003·14 cites·9 claims
- 1772US6871773B2Composite metallic ultrafine particles and process for producing the sameEBARA CORP·Filed 2004·Granted Mar 29, 2005·15 cites·4 claims
- 1869US6709555B1Plating method, interconnection forming method, and apparatus for carrying out those methodsEBARA CORP·Filed 2000·Granted Mar 23, 2004·12 cites·13 claims
- 1968US6745784B2Method of and apparatus for cleaning substrateEBARA CORP·Filed 2003·Granted Jun 8, 2004·11 cites·28 claims
- 2066US6897021B2Reactive probe chip, composite substrate and method for fabrication of the sameEBARA CORP·Filed 2001·Granted May 24, 2005·6 cites·62 claims
- 2166US2025144674A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2025·Application pending·0 cites
- 2266US2025144675A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2025·Application pending·0 cites
- 2365US7498261B2Method and apparatus for forming metal filmEBARA CORP·Filed 2005·Granted Mar 3, 2009·3 cites·6 claims
- 2464US7217653B2Interconnects forming method and interconnects forming apparatusEBARA CORP·Filed 2004·Granted May 15, 2007·10 cites·39 claims
- 2564US6740242B2Plating apparatus and method of managing plating liquid compositionEBARA CORP·Filed 2001·Granted May 25, 2004·3 cites·4 claims
- 2663US7374584B2Interconnects forming method and interconnects forming apparatusEBARA CORP·Filed 2007·Granted May 20, 2008·2 cites·3 claims
- 2763US6780245B2Method and apparatus of producing thin film of metal or metal compoundEBARA CORP·Filed 2002·Granted Aug 24, 2004·7 cites·7 claims
- 2858US7179503B2Method of forming thin metal films on substratesEBARA CORP·Filed 2003·Granted Feb 20, 2007·4 cites·9 claims
- 2958US5169419AGas adsorber for exhaust gasEBARA CORP·Filed 1991·Granted Dec 8, 1992·20 cites·7 claims
- 3057US8784636B2Plating apparatus and plating methodNAGAI MIZUKI·Filed 2008·Granted Jul 22, 2014·1 cites·15 claims
- 3156US7407821B2Substrate processing methodEBARA CORP·Filed 2004·Granted Aug 5, 2008·4 cites·13 claims
- 3256US2021166967A1Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2018·Application pending·0 cites
- 3353US12251738B2Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing toolEBARA CORP·Filed 2021·Granted Mar 18, 2025·0 cites·7 claims
- 3453US2014287580A1Method for forming conductive structure, and plating apparatus and plating methodEBARA CORP·Filed 2014·Application pending·0 cites
- 3553US2007141251A1Method of forming thin metal films on substratesEBARA CORP·Filed 2007·Application pending·0 cites
- 3653US2021039142A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2019·Application pending·0 cites
- 3752US12358028B2Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleaning methodEBARA CORP·Filed 2021·Granted Jul 15, 2025·0 cites·5 claims
- 3852US6776919B2Method and apparatus for etching ruthenium filmsEBARA CORP·Filed 2001·Granted Aug 17, 2004·4 cites·11 claims
- 3952US2004163948A1Plating apparatus and method of managing plating liquid compositionFiled 2004·Application pending·0 cites
- 4052US2008000776A1Method and apparatus for processing substrateWANG XINMING·Filed 2007·Application pending·0 cites
- 4152US2005003556A1Probe Beads for affirnity reaction and detection systemFiled 2002·Application pending·0 cites
- 4251US6447632B1Apparatus and nozzle device for gaseous polishingEBARA CORP·Filed 1999·Granted Sep 10, 2002·18 cites·21 claims
- 4351US4906257AMethod of and apparatus for treating waste gas from semiconductor manufacturing processTAKEDA CHEMICAL INDUSTRIES LTD·Filed 1988·Granted Mar 6, 1990·17 cites·12 claims
- 4451US2009000549A1Substrate processing method and apparatusWANG XINMING·Filed 2008·Application pending·0 cites
- 4551US2005191699A1Reactive probe chip, composite substrate and method for fabrication of the sameEBARA CORP·Filed 2005·Application pending·0 cites
- 4650US2022292889A1Information processing apparatus and storage mediumHONDA MOTOR CO LTD·Filed 2022·Application pending·0 cites
- 4749US12438100B2Three-dimensional memory device with multiple types of support pillar structures and method of forming the sameSANDISK TECHNOLOGIES LLC·Filed 2022·Granted Oct 7, 2025·0 cites·18 claims
- 4849US2010075498A1Semiconductor device and method for manufacturing the same, and processing liquidTAKAGI DAISUKE·Filed 2009·Application pending·0 cites
- 4949US2006003521A1Method of and apparatus for manufacturing semiconductor deviceFUKUNAGA AKIRA·Filed 2005·Application pending·0 cites
- 5045US2007243797A1Polishing method and polishing apparatusFUKUNAGA AKIRA·Filed 2007·Application pending·0 cites
Showing the top 50 of 80 patent records by PatentIndex Score.
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