Inventor
YOKOGAWA KENETSU
JP56 patents
⚠️ This page may combine multiple inventors who share the name “YOKOGAWA KENETSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
27 patentsUSD871609SDec 31, 2019
Electrode plate peripheral ring for a plasma processing apparatus
HITACHI HIGH TECH CORP41 citations93
USD868993SDec 3, 2019
Electrode plate for a plasma processing apparatus
HITACHI HIGH TECH CORP36 citations93
USD870314SDec 17, 2019
Electrode cover for a plasma processing apparatus
HITACHI HIGH TECH CORP34 citations92
US9038567B2May 26, 2015
Plasma processing apparatus
HITACHI HIGH TECH CORP5 citations84
US7767054B2Aug 3, 2010
Plasma processing apparatus
HITACHI HIGH TECH CORP9 citations84
USD891636SJul 28, 2020
Ring for a plasma processing apparatus
HITACHI HIGH TECH CORP6 citations83
US11398371B2Jul 26, 2022
Plasma processing apparatus
HITACHI HIGH TECH CORP4 citations73
US10825664B2Nov 3, 2020
Wafer processing method and wafer processing apparatus
HITACHI HIGH TECH CORP3 citations73
US10825657B2Nov 3, 2020
Plasma processing apparatus
HITACHI HIGH TECH CORP2 citations73
US10217611B2Feb 26, 2019
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP4 citations73
US7371690B2May 13, 2008
Dry etching method and apparatus
HITACHI HIGH TECH CORP8 citations73
US10804080B2Oct 13, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP3 citations72
US10037909B2Jul 31, 2018
Plasma processing apparatus
HITACHI HIGH TECH CORP3 citations72
US11094509B2Aug 17, 2021
Plasma processing apparatus
HITACHI HIGH TECH CORP2 citations71
US12237174B2Feb 25, 2025
Etching method
HITACHI HIGH TECH CORP0 citations62
US11915951B2Feb 27, 2024
Plasma processing method
HITACHI HIGH TECH CORP1 citations62
US11842885B2Dec 12, 2023
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations62
US11682542B2Jun 20, 2023
Plasma processing device
HITACHI HIGH TECH CORP0 citations62
US10930476B2Feb 23, 2021
Plasma processing device
HITACHI HIGH TECH CORP1 citations62
US11355322B2Jun 7, 2022
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations52
US10811231B2Oct 20, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations52
US7842619B2Nov 30, 2010
Plasma processing method
HITACHI HIGH TECH CORP1 citations52
US7435687B2Oct 14, 2008
Plasma processing method and plasma processing device
HITACHI HIGH TECH CORP0 citations52
US11424106B2Aug 23, 2022
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations51
US12444581B2Oct 14, 2025
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations50
US9887070B2Feb 6, 2018
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations48
US9779919B2Oct 3, 2017
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations48
HITACHI LTD
11 patentsUS6136214AOct 24, 2000
Plasma processing method and apparatus
HITACHI LTD54 citations96
US7662232B2Feb 16, 2010
Plasma processing apparatus
HITACHI LTD14 citations92
US6573190B1Jun 3, 2003
Dry etching device and dry etching method
HITACHI LTD19 citations92
US6475918B1Nov 5, 2002
Plasma treatment apparatus and plasma treatment method
HITACHI LTD24 citations92
US5554257ASep 10, 1996
Method of treating surfaces with atomic or molecular beam
HITACHI LTD33 citations92
US6629538B2Oct 7, 2003
Method for cleaning semiconductor wafers in a vacuum environment
HITACHI LTD14 citations84
US6713401B2Mar 30, 2004
Method for manufacturing semiconductor device
HITACHI LTD12 citations74
US6643893B2Nov 11, 2003
Apparatus for cleaning semiconductor wafers in a vacuum environment
HITACHI LTD10 citations74
US6511608B1Jan 28, 2003
Plasma processing method
HITACHI LTD8 citations74
US6579154B2Jun 17, 2003
Dry chemical-mechanical polishing method
HITACHI LTD3 citations63
US7372582B2May 13, 2008
Method for fabrication semiconductor device
HITACHI LTD6 citations62
KOBAYASHI HIROYUKI
3 patentsTANDOU TAKUMI
3 patentsRENESAS TECH CORP
2 patentsYOKOGAWA KENETSU
2 patentsUSUI TATEHITO
1 patentMAEDA KENJI
1 patentShowing the top 50 of 56 patents by PatentIndex Score.