Inventor
YONEZAWA TOSHIHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “YONEZAWA TOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS6084215AJul 4, 2000
Semiconductor wafer holder with spring-mounted temperature measurement apparatus disposed therein
TOKYO ELECTRON LTD163 citations98
US5999268ADec 7, 1999
Apparatus for aligning a semiconductor wafer with an inspection contactor
TOKYO ELECTRON LTD146 citations97
US5708222AJan 13, 1998
Inspection apparatus, transportation apparatus, and temperature control apparatus
TOKYO ELECTRON LTD47 citations89
US6205652B1Mar 27, 2001
Vacuum coupling system
TOKYO ELECTRON LTD17 citations83
US6831455B2Dec 14, 2004
Mechanism for fixing probe card
TOKYO ELECTRON LTD9 citations72
USRE42655EAug 30, 2011
Mechanism for fixing probe card
TOKYO ELECTRON LTD1 citations61
US7847569B2Dec 7, 2010
Probe device and method of regulating contact pressure between object to be inspected and probe
TOKYO ELECTRON LTD3 citations59
USRE42115EFeb 8, 2011
Mechanism for fixing probe card
TOKYO ELECTRON LTD0 citations51
YONEZAWA TOSHIHIRO
3 patentsUS8674717B2Mar 18, 2014
Cantilevered probe having a bending contact
YONEZAWA TOSHIHIRO4 citations70
US8415964B2Apr 9, 2013
Probe card having a structure for being prevented from deforming
YONEZAWA TOSHIHIRO1 citations45
US8319511B2Nov 27, 2012
Probe device having a structure for being prevented from deforming
YONEZAWA TOSHIHIRO0 citations34