Inventor
ISHIBASHI TOMOATSU
JP54 patents
⚠️ This page may combine multiple inventors who share the name “ISHIBASHI TOMOATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
47 patentsUS10453708B2Oct 22, 2019
Cleaning device and roll cleaning member
EBARA CORP15 citations86
US10170344B2Jan 1, 2019
Washing device and washing method
EBARA CORP8 citations84
USD822926SJul 10, 2018
Sponge for substrate cleaning
EBARA CORP10 citations84
USD805268SDec 12, 2017
Sponge for substrate cleaning
EBARA CORP7 citations84
USD800401SOct 17, 2017
Roller for substrate cleaning
EBARA CORP6 citations84
USD787143SMay 16, 2017
Sponge for substrate cleaning
EBARA CORP8 citations84
US9142399B2Sep 22, 2015
Substrate cleaning method
EBARA CORP8 citations84
USD735427SJul 28, 2015
Roller shaft for substrate cleaning
EBARA CORP7 citations84
USD728177SApr 28, 2015
Roller shaft for substrate cleaning
EBARA CORP12 citations84
US10008380B2Jun 26, 2018
Substrate drying apparatus, substrate drying method and control program
EBARA CORP7 citations83
US11660643B2May 30, 2023
Substrate cleaning device and substrate cleaning method
EBARA CORP2 citations73
US11164758B2Nov 2, 2021
Washing device and washing method
EBARA CORP3 citations73
US10737301B2Aug 11, 2020
Substrate cleaning apparatus
EBARA CORP4 citations73
US10625308B2Apr 21, 2020
Cleaning device, method of manufacturing the same and substrate cleaning apparatus
EBARA CORP2 citations73
US10471481B2Nov 12, 2019
Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these
EBARA CORP3 citations73
US10395949B2Aug 27, 2019
Substrate drying apparatus, storage medium, and substrate drying method
EBARA CORP4 citations73
US10192757B2Jan 29, 2019
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP2 citations73
US10090189B2Oct 2, 2018
Substrate cleaning apparatus comprising a second jet nozzle surrounding a first jet nozzle
EBARA CORP6 citations73
US10002778B2Jun 19, 2018
Substrate cleaning apparatus
EBARA CORP2 citations73
US9824903B2Nov 21, 2017
Substrate cleaning apparatus
EBARA CORP2 citations73
USD799768SOct 10, 2017
Roller for substrate cleaning
EBARA CORP2 citations73
USD799129SOct 3, 2017
Sponge for substrate cleaning
EBARA CORP2 citations73
US9677811B2Jun 13, 2017
Substrate cleaning and drying apparatus
EBARA CORP4 citations73
US8769842B2Jul 8, 2014
Substrate drying apparatus, substrate drying method and control program
EBARA CORP5 citations72
US9466512B2Oct 11, 2016
Substrate cleaning apparatus and substrate processing apparatus
EBARA CORP2 citations63
US9162337B2Oct 20, 2015
Polishing apparatus
EBARA CORP2 citations63
US12394639B2Aug 19, 2025
Substrate drying device and substrate drying method
EBARA CORP0 citations62
US11837477B2Dec 5, 2023
Washing device and washing method
EBARA CORP0 citations62
US11642704B2May 9, 2023
Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these
EBARA CORP0 citations62
US10991602B2Apr 27, 2021
Substrate washing device
EBARA CORP1 citations62
US11180303B2Nov 23, 2021
Storage container of scrubbing member and package of same
EBARA CORP0 citations61
US11094548B2Aug 17, 2021
Apparatus for cleaning substrate and substrate cleaning method
EBARA CORP1 citations61
US12033847B2Jul 9, 2024
Cleaning module, substrate processing apparatus including cleaning module, and cleaning method
EBARA CORP0 citations57
US11626299B2Apr 11, 2023
Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatus
EBARA CORP0 citations56
US12485516B2Dec 2, 2025
Substrate cleaning apparatus, polishing apparatus, buffing apparatus, substrate cleaning method, substrate processing apparatus, and machine learning apparatus
EBARA CORP0 citations52
US11676827B2Jun 13, 2023
Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus
EBARA CORP0 citations52
US11501983B2Nov 15, 2022
Substrate cleaning member and substrate cleaning apparatus
EBARA CORP0 citations52
US11424138B2Aug 23, 2022
Substrate cleaning tool, substrate cleaning apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate cleaning tool
EBARA CORP0 citations52
US11081373B2Aug 3, 2021
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations52
US10892173B2Jan 12, 2021
Substrate cleaning roll, substrate cleaning apparatus, and substrate cleaning method
EBARA CORP0 citations52
US10315232B2Jun 11, 2019
Cleaning member and substrate cleaning apparatus
EBARA CORP0 citations52
US9643216B2May 9, 2017
Cleaning device, method of manufacturing the same and substrate cleaning apparatus
EBARA CORP1 citations52
US9640384B2May 2, 2017
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP1 citations52
US9058977B2Jun 16, 2015
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP1 citations52
US11817311B2Nov 14, 2023
Substrate cleaning method and substrate cleaning apparatus
EBARA CORP0 citations48
US11524322B2Dec 13, 2022
Jig for attaching and detaching cleaning member
EBARA CORP0 citations47
US10163664B2Dec 25, 2018
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations42
ISHIBASHI TOMOATSU
3 patentsShowing the top 50 of 54 patents by PatentIndex Score.