P

Inventor

YAMASHITA JUN

JP48 patents
⚠️ This page may combine multiple inventors who share the name “YAMASHITA JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

13 patents
USD582949SDec 16, 2008

Cover for a heater stage of a plasma processing apparatus

TOKYO ELECTRON LTD31 citations92
US7981218B2Jul 19, 2011

Substrate supporting mechanism and substrate processing apparatus

TOKYO ELECTRON LTD13 citations84
US7707965B2May 4, 2010

Processing apparatus and lid opening/closing mechanism

TOKYO ELECTRON LTD7 citations74
US7547860B2Jun 16, 2009

Microwave plasma processing apparatus for semiconductor element production

TOKYO ELECTRON LTD7 citations74
US10266945B2Apr 23, 2019

Gas mixing device and substrate processing apparatus

TOKYO ELECTRON LTD2 citations73
US9204500B2Dec 1, 2015

Microwave heating apparatus and processing method

TOKYO ELECTRON LTD2 citations63
US10410876B2Sep 10, 2019

Apparatus and method for processing gas, and storage medium

TOKYO ELECTRON LTD1 citations62
USD563949SMar 11, 2008

Microwave introducing antenna for a plasma processing apparatus

TOKYO ELECTRON LTD2 citations62
USD563951SMar 11, 2008

Microwave introducing antenna for a plasma processing apparatus

TOKYO ELECTRON LTD2 citations62
USD563950SMar 11, 2008

Microwave introducing antenna for a plasma processing apparatus

TOKYO ELECTRON LTD3 citations61
US11251025B2Feb 15, 2022

Processing device having opening enabling gas to communicate between diffusion path and treatment chamber and member having diffusion path

TOKYO ELECTRON LTD0 citations52
USD572707SJul 8, 2008

Microwave introducing antenna for a plasma processing apparatus

TOKYO ELECTRON LTD0 citations52
US8377254B2Feb 19, 2013

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations42

FUJI XEROX CO LTD

4 patents

YAMASHITA JUN

4 patents

SANKYO SEIKI SEISAKUSHO KK

3 patents

IHEART JAPAN CORP

3 patents

SUZUKI KOUKI

2 patents

NISSIN KOGYO KK

2 patents

TOSHIBA KK

1 patent

YAMAMOTO KAZUO

1 patent

SANKYO SEIKI MFG LTD

1 patent

SAMSUNG ELECTRONICS CO LTD

1 patent

IDEMITSU KOSAN CO

1 patent

UBE INDUSTRIES

1 patent

MONDEN TAICHI

1 patent

MITSUBISHI TANABE PHARMA CORP

1 patent

JEOL LTD

1 patent

OKANO TERUO

1 patent

MATSUMOTO HIDEAKI

1 patent

IKEDA YUTAKA

1 patent

DENSO CORP

1 patent

TAKEDA TADASHI

1 patent

TOKAI KAZUMA

1 patent

ISHIBASHI KIYOTAKA

1 patent

NEW JAPAN RADIO CO LTD

1 patent