Inventor
LAVITSKY ILYA
US22 patents
Patents
22 patentsUSD941372SJan 18, 2022
Process shield for a substrate processing chamber
APPLIED MATERIALS INC19 citations94
USD941371SJan 18, 2022
Process shield for a substrate processing chamber
APPLIED MATERIALS INC17 citations94
USD934315SOct 26, 2021
Deposition ring for a substrate processing chamber
APPLIED MATERIALS INC35 citations94
USD937329SNov 30, 2021
Sputter target for a physical vapor deposition chamber
APPLIED MATERIALS INC19 citations93
US7670436B2Mar 2, 2010
Support ring assembly
APPLIED MATERIALS INC26 citations92
US7569125B2Aug 4, 2009
Shields usable with an inductively coupled plasma reactor
APPLIED MATERIALS INC16 citations92
US7041201B2May 9, 2006
Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith
APPLIED MATERIALS INC31 citations92
US6730174B2May 4, 2004
Unitary removable shield assembly
APPLIED MATERIALS INC51 citations91
US6776848B2Aug 17, 2004
Motorized chamber lid
APPLIED MATERIALS INC21 citations90
USD970566SNov 22, 2022
Sputter target for a physical vapor deposition chamber
APPLIED MATERIALS INC12 citations84
US8865602B2Oct 21, 2014
Edge ring lip
APPLIED MATERIALS INC8 citations84
US11915918B2Feb 27, 2024
Cleaning of sin with CCP plasma or RPS clean
APPLIED MATERIALS INC4 citations74
US11670493B2Jun 6, 2023
Isolator ring clamp and physical vapor deposition chamber incorporating same
APPLIED MATERIALS INC2 citations73
US10998172B2May 4, 2021
Substrate processing chamber having improved process volume sealing
APPLIED MATERIALS INC4 citations72
US7371285B2May 13, 2008
Motorized chamber lid
APPLIED MATERIALS INC8 citations71
US6688838B2Feb 10, 2004
Cleanroom lift having an articulated arm
APPLIED MATERIALS INC5 citations63
USD1037954SAug 6, 2024
Self-retained low friction pad
APPLIED MATERIALS INC1 citations62
US12027354B2Jul 2, 2024
Cleaning of SIN with CCP plasma or RPS clean
APPLIED MATERIALS INC0 citations62
US11618943B2Apr 4, 2023
PVD target having self-retained low friction pads
APPLIED MATERIALS INC0 citations62
US11339466B2May 24, 2022
Heated shield for physical vapor deposition chamber
APPLIED MATERIALS INC0 citations62
US9564348B2Feb 7, 2017
Shutter blade and robot blade with CTE compensation
APPLIED MATERIALS INC1 citations52
US9928997B2Mar 27, 2018
Apparatus for PVD dielectric deposition
APPLIED MATERIALS INC1 citations50