P

Inventor

TSURI MAKOTO

JP5 patents
⚠️ This page may combine multiple inventors who share the name “TSURI MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

4 patents
USD940669SJan 11, 2022

Boat for substrate processing apparatus

KOKUSAI ELECTRIC CORP7 citations84
USD924823SJul 13, 2021

Adiabatic plate for substrate processing apparatus

KOKUSAI ELECTRIC CORP14 citations84
USD920935SJun 1, 2021

Boat for substrate processing apparatus

KOKUSAI ELECTRIC CORP12 citations83
USD890572SJul 21, 2020

Gas supply nozzle for substrate processing apparatus

KOKUSAI ELECTRIC CORP10 citations82

HIRANO MAKOTO

1 patent
US8777553B2Jul 15, 2014

Semiconductor manufacturing apparatus and semiconductor device manufacturing method

HIRANO MAKOTO10 citations81