Inventor · disambiguated record
Evan R. Mapoles
Also filed as: MAPOLES EVAN · MAPOLES EVAN R
6 granted patents·88 citations·filing 2001–2005
82Inventor score
Top patents by PatentIndex Score
6 records- 0187US7106432B1Surface inspection system and method for using photo detector array to detect defects in inspection surfaceKLA TENCOR TECH CORP·Filed 2002·Granted Sep 12, 2006·35 cites·13 claims
- 0286US7436503B1Dark field inspection apparatus and methodsKLA TENCOR TECH CORP·Filed 2004·Granted Oct 14, 2008·35 cites·20 claims
- 0368US7505619B2System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surfaceKLA TENCOR TECH CORP·Filed 2005·Granted Mar 17, 2009·2 cites·30 claims
- 0467US7106434B1Inspection toolKLA TENCOR TECHNOLOGIES INC·Filed 2003·Granted Sep 12, 2006·14 cites·20 claims
- 0545US6617555B1Imaging stabilization apparatus and method for high-performance optical systemsULTRATECH STEPPER INC·Filed 2001·Granted Sep 9, 2003·2 cites·27 claims
- 0637US6989515B2Imaging stabilization apparatus and method for high-performance optical systemsULTRATECH INC·Filed 2003·Granted Jan 24, 2006·0 cites·45 claims
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