Inventor · disambiguated record
Akihisa Sekiguchi
Also filed as: SEKIGUCHI AKIHISA
9 granted patents·3 pending applications·265 citations·filing 1994–2007
89Inventor score
Top patents by PatentIndex Score
12 records- 0192US7504700B2Method of forming an ultra-thin [[HfSiO]] metal silicate film for high performance CMOS applications and semiconductor structure formed in said methodIBM·Filed 2005·Granted Mar 17, 2009·26 cites·20 claims
- 0292US5468955ANeutral beam apparatus for in-situ production of reactants and kinetic energy transferIBM·Filed 1994·Granted Nov 21, 1995·108 cites·20 claims
- 0388US6821833B1Method for separately optimizing thin gate dielectric of PMOS and NMOS transistors within the same semiconductor chip and device manufactured therebyIBM·Filed 2003·Granted Nov 23, 2004·46 cites·18 claims
- 0483US6426305B1Patterned plasma nitridation for selective epi and silicide formationIBM·Filed 2001·Granted Jul 30, 2002·29 cites·36 claims
- 0576US6960510B2Method of making sub-lithographic featuresIBM·Filed 2002·Granted Nov 1, 2005·21 cites·11 claims
- 0673US7160771B2Forming gate oxides having multiple thicknessesIBM·Filed 2003·Granted Jan 9, 2007·20 cites·7 claims
- 0769US6946358B2Method of fabricating shallow trench isolation by ultra-thin SIMOX processingIBM·Filed 2003·Granted Sep 20, 2005·14 cites·10 claims
- 0847US2007205472A1Formation of a disposable spacer to post dope a gate conductorIBM·Filed 2007·Application pending·0 cites
- 0946US2005287764A1Method of fabricating shallow trench isolation by ultra-thin simox processingIBM·Filed 2005·Application pending·0 cites
- 1045US6819841B2Self-aligned optical waveguide to optical fiber connection systemIBM·Filed 2002·Granted Nov 16, 2004·1 cites·27 claims
- 1140US2006096951A1Apparatus and method for controlling process non-uniformityTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1239US7229885B2Formation of a disposable spacer to post dope a gate conductorIBM·Filed 2004·Granted Jun 12, 2007·0 cites·4 claims
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