Inventor
KANEKO HIROFUMI
JP22 patents
⚠️ This page may combine multiple inventors who share the name “KANEKO HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS9759489B2Sep 12, 2017
Heat treatment apparatus
TOKYO ELECTRON LTD463 citations98
USD619630SJul 13, 2010
Process tube for manufacturing semiconductor wafers
TOKYO ELECTRON LTD17 citations92
USD570309SJun 3, 2008
Wafer boat
TOKYO ELECTRON LTD27 citations92
USD590359SApr 14, 2009
Process tube for manufacturing semiconductor wafers or the like
TOKYO ELECTRON LTD7 citations73
US10636627B2Apr 28, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations61
US7798811B2Sep 21, 2010
Vertical type heat processing apparatus and vertical type heating method
TOKYO ELECTRON LTD5 citations61
US10465986B2Nov 5, 2019
Heat treatment apparatus
TOKYO ELECTRON LTD0 citations52
US9845991B2Dec 19, 2017
Heat treatment apparatus
TOKYO ELECTRON LTD1 citations52
US11302542B2Apr 12, 2022
Processing apparatus
TOKYO ELECTRON LTD0 citations47
US10281214B2May 7, 2019
Heat treatment apparatus
TOKYO ELECTRON LTD0 citations41
KANEKO HIROFUMI
5 patentsUSD725053SMar 24, 2015
Outer tube for process tube for manufacturing semiconductor wafers
KANEKO HIROFUMI19 citations92
USD720309SDec 30, 2014
Inner tube for process tube for manufacturing semiconductor wafers
KANEKO HIROFUMI17 citations92
USD724551SMar 17, 2015
Inner tube for process tube for manufacturing semiconductor wafers
KANEKO HIROFUMI9 citations83
USD720308SDec 30, 2014
Inner tube for process tube for manufacturing semiconductor wafers
KANEKO HIROFUMI6 citations83
US8216378B2Jul 10, 2012
Reaction tube and heat processing apparatus for a semiconductor process
KANEKO HIROFUMI0 citations38