Inventor
AKIYAMA SHUJI
JP32 patents
⚠️ This page may combine multiple inventors who share the name “AKIYAMA SHUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
22 patentsUS4899105AFeb 6, 1990
Method of testing electrical characteristics of LCD with probe device
TOKYO ELECTRON LTD62 citations96
US7044703B2May 16, 2006
Automatic guided vehicle, automatic guided vehicle system and wafer carrying method
TOKYO ELECTRON LTD29 citations92
US6874638B2Apr 5, 2005
Wafer cassette
TOKYO ELECTRON LTD28 citations92
US5798651AAug 25, 1998
Probe system
TOKYO ELECTRON LTD27 citations90
US7283890B2Oct 16, 2007
Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method
TOKYO ELECTRON LTD15 citations84
US7457680B2Nov 25, 2008
Conveyance method for transporting objects
TOKYO ELECTRON LTD10 citations83
US7153087B2Dec 26, 2006
Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method
TOKYO ELECTRON LTD12 citations83
US7701236B2Apr 20, 2010
Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer
TOKYO ELECTRON LTD16 citations82
US7583096B2Sep 1, 2009
Probing apparatus and probing method
TOKYO ELECTRON LTD6 citations73
USD592230SMay 12, 2009
Wafer carrying-in/out machine
TOKYO ELECTRON LTD6 citations73
US6721626B2Apr 13, 2004
Wafer transfer system, wafer transfer method and automatic guided vehicle system
TOKYO ELECTRON LTD9 citations73
US5801527ASep 1, 1998
Apparatus and method for testing semiconductor device
TOKYO ELECTRON LTD16 citations73
US9684014B2Jun 20, 2017
Prober for inspecting semiconductor devices formed on semiconductor wafer
TOKYO ELECTRON LTD3 citations71
US7153079B2Dec 26, 2006
Automated guided vehicle
TOKYO ELECTRON LTD9 citations71
US10823778B2Nov 3, 2020
Inspection system
TOKYO ELECTRON LTD3 citations70
US11515175B2Nov 29, 2022
Wafer inspection apparatus
TOKYO ELECTRON LTD0 citations62
US7887280B2Feb 15, 2011
Processing apparatus
TOKYO ELECTRON LTD2 citations62
US7741837B2Jun 22, 2010
Probe apparatus
TOKYO ELECTRON LTD3 citations62
USD607424SJan 5, 2010
Wafer carrying-in/out apparatus
TOKYO ELECTRON LTD3 citations62
US7794350B2Sep 14, 2010
Turning device for heavy object
TOKYO ELECTRON LTD4 citations60
US9383389B2Jul 5, 2016
Prober and needle-tip polishing device for probe card
TOKYO ELECTRON LTD1 citations52
USD602882SOct 27, 2009
Wafer carrying-in/out apparatus
TOKYO ELECTRON LTD0 citations52
NIPPON ELECTRIC GLASS CO
5 patentsUS10766804B2Sep 8, 2020
Glass film production method
NIPPON ELECTRIC GLASS CO3 citations71
US9914590B2Mar 13, 2018
Workpiece conveyance method and workpiece conveyance device
NIPPON ELECTRIC GLASS CO4 citations71
US11511461B2Nov 29, 2022
Glass film manufacturing method
NIPPON ELECTRIC GLASS CO0 citations62
US10889519B2Jan 12, 2021
Method for manufacturing glass roll
NIPPON ELECTRIC GLASS CO1 citations61
US11459264B2Oct 4, 2022
Method for producing glass film
NIPPON ELECTRIC GLASS CO0 citations52