Inventor

WADA YUICHI

JP61 patents

⚠️ This page may combine multiple inventors who share the name “WADA YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WADA YUICHI

APPLIED MATERIALS INC

Film deposition method and apparatus

Inner shield for a substrate processing chamber

Method and apparatus for producing a uniform density plasma above a substrate

Sputtering reactor and method of using an unbalanced magnetron

Maskless fabrication of waveguide mirrors

Lower shield for a substrate processing chamber

Solution to thermal budget

Film deposition method and apparatus

Upper shield with showerhead for a process chamber

Methods and apparatus for cleaving of semiconductor substrates

Shutter disk

Methods and apparatus for processing a substrate

Shutter disk

Lower shield for a substrate processing chamber

Film deposition method and apparatus for semiconductor devices

Film deposition method and apparatus for semiconductor devices

Inline microwave batch degas chamber

Methods and apparatus for cleaving of semiconductor substrates

Methods and apparatus for processing a substrate

Methods and apparatus for cleaving of semiconductor substrates

Methods and apparatus for high voltage electrostatic chuck protection

Shutter disk

Methods and apparatus for reducing defects in preclean chambers

MITSUBISHI ELECTRIC CORP

Circuit breaker

Electromagnetic contactor

Power switch

Electromagnetic contactor

Slit type current limiting fuse

Switch

Switchgear

Power switch

Switch

High-speed current limiting circuit breaker

HITACHI INT ELECTRIC INC

Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium

Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium

Storage device, vaporizer and substrate processing apparatus

Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium

Manufacturing method of semiconductor device

Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate

Substrate processing apparatus, heater and method of manufacturing semiconductor device

Heater for semiconductor thermal process

Heater for semiconductor thermal process

TOKYO ELECTRON LTD

Substrate processing apparatus

Treatment apparatus

Multilevel interconnection forming method for forming a semiconductor device

TEL VARIAN LIMITED

Processing apparatus with collimator exchange device

Processing apparatus with an invertible collimator and a processing method therefor

APPLIED MATERIAL INC

Embedded waveguide detectors

TOKAI RUBBER IND INC

Through-panel fixing device for piping member

KOKUSAI ELECTRIC CORP

Substrate processing apparatus, heater and method of manufacturing semiconductor device