Inventor
HISHIYA KATSUYUKI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “HISHIYA KATSUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HONMA MANABU
9 patentsUSD655261SMar 6, 2012
Gas-separating plate for reactor for manufacturing semiconductor
HONMA MANABU421 citations98
USD655260SMar 6, 2012
Gas-separating plate for reactor for manufacturing semiconductor
HONMA MANABU421 citations98
USD654884SFeb 28, 2012
Top plate for reactor for manufacturing semiconductor
HONMA MANABU525 citations98
USD654882SFeb 28, 2012
Gas-separating plate for reactor for manufacturing semiconductor
HONMA MANABU421 citations98
USD655257SMar 6, 2012
Top plate for reactor for manufacturing semiconductor
HONMA MANABU23 citations92
USD655259SMar 6, 2012
Top plate for reactor for manufacturing semiconductor
HONMA MANABU22 citations92
USD654883SFeb 28, 2012
Top plate for reactor for manufacturing semiconductor
HONMA MANABU28 citations92
USD655262SMar 6, 2012
Side wall for reactor for manufacturing semiconductor
HONMA MANABU8 citations84
USD655258SMar 6, 2012
Side wall for reactor for manufacturing semiconductor
HONMA MANABU11 citations84
TOKYO ELECTRON LTD
5 patentsUS7896648B2Mar 1, 2011
Vertical heat processing apparatus and heat processing method using the vertical heat processing apparatus
TOKYO ELECTRON LTD10 citations82
US10550467B2Feb 4, 2020
Film formation apparatus
TOKYO ELECTRON LTD1 citations62
US7922485B2Apr 12, 2011
Vertical type heat processing apparatus and vertical type heat processing method
TOKYO ELECTRON LTD5 citations61
US9702043B2Jul 11, 2017
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations52
US10519550B2Dec 31, 2019
Film formation apparatus
TOKYO ELECTRON LTD0 citations41
KATO HITOSHI
3 patentsUS9932674B2Apr 3, 2018
Film deposition apparatus, film deposition method, and computer-readable recording medium
KATO HITOSHI14 citations83
US9453280B2Sep 27, 2016
Film deposition apparatus, film deposition method and storage medium
KATO HITOSHI4 citations71
US9062373B2Jun 23, 2015
Film deposition apparatus
KATO HITOSHI2 citations61
HISHIYA KATSUYUKI
3 patentsUS8414242B2Apr 9, 2013
Processing apparatus and processing method
HISHIYA KATSUYUKI3 citations60
US8231381B2Jul 31, 2012
Processing system for process object and thermal processing method for process object
HISHIYA KATSUYUKI4 citations60
US8181769B2May 22, 2012
Workpiece transfer mechanism, workpiece transfer method and workpiece processing system
HISHIYA KATSUYUKI3 citations58