Inventor

NAKASHIMA SEIYO

JP17 patents

⚠️ This page may combine multiple inventors who share the name “NAKASHIMA SEIYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAKASHIMA SEIYO

KOKUSAI ELECTRIC CORP

Adiabatic plate for substrate processing appratus

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

Furnace opening structure, substrate processing apparatus and method of manufacturing semiconductor device

Substrate processing apparatus, process vessel, method of manufacturing semiconductor device and non-transitory tangible medium

Separator of substrate processing apparatus

Substrate processing apparatus

HITACHI INT ELECTRIC INC

Reaction tube

Substrate treating apparatus and semiconductor device manufacturing method

Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device

Substrate processing apparatus

Substrate processing apparatus having gas side flow via gas inlet

NAKASHIMA SEIYO

Method of manufacturing a semiconductor device

Substrate processing apparatus, method for manufacturing semiconductor device, and process tube

Substrate processing apparatus

SHIMADA MASAKAZU

Semiconductor manufacturing equipment

Semiconductor manufacturing equipment

ABURATANI YUKINORI

Substrate processing apparatus and manufacturing method of a semiconductor device