Inventor
NOGAMI TAKASHI
JP27 patents
⚠️ This page may combine multiple inventors who share the name “NOGAMI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
8 patentsUS10636681B2Apr 28, 2020
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP6 citations84
US12123091B2Oct 22, 2024
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP2 citations73
US11512392B2Nov 29, 2022
Substrate processing apparatus
KOKUSAI ELECTRIC CORP2 citations73
US11062918B2Jul 13, 2021
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP2 citations73
US11177143B2Nov 16, 2021
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP5 citations72
US11456190B2Sep 27, 2022
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US12261066B2Mar 25, 2025
Substrate processing apparatus and furnace opening closer
KOKUSAI ELECTRIC CORP0 citations59
US12255069B2Mar 18, 2025
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations49
HITACHI INT ELECTRIC INC
6 patentsUSD822081SJul 3, 2018
Rotary tool for boat of semiconductor manufacturing apparatus
HITACHI INT ELECTRIC INC19 citations94
USD803908SNov 28, 2017
Rotary tool for boat of semiconductor manufacturing apparatus
HITACHI INT ELECTRIC INC25 citations94
US10508336B2Dec 17, 2019
Substrate processing apparatus
HITACHI INT ELECTRIC INC7 citations84
US9966286B2May 8, 2018
Substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations67
US10837112B2Nov 17, 2020
Substrate processing apparatus
HITACHI INT ELECTRIC INC0 citations40
US10403528B2Sep 3, 2019
Substrate-processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations40