Inventor
OW YUEH SHENG
SG30 patents
⚠️ This page may combine multiple inventors who share the name “OW YUEH SHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
29 patentsUS9171714B2Oct 27, 2015
Integrated processing of porous dielectric, polymer-coated substrates and epoxy within a multi-chamber vacuum system confirmation
APPLIED MATERIALS INC521 citations98
USD913979SMar 23, 2021
Inner shield for a substrate processing chamber
APPLIED MATERIALS INC27 citations93
USD931241SSep 21, 2021
Lower shield for a substrate processing chamber
APPLIED MATERIALS INC5 citations83
USD973609SDec 27, 2022
Upper shield with showerhead for a process chamber
APPLIED MATERIALS INC5 citations71
US11328929B2May 10, 2022
Methods, apparatuses and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC2 citations71
US10629430B2Apr 21, 2020
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
APPLIED MATERIALS INC4 citations70
US9960035B2May 1, 2018
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
APPLIED MATERIALS INC2 citations70
US9548200B2Jan 17, 2017
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
APPLIED MATERIALS INC3 citations70
US10991617B2Apr 27, 2021
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC2 citations69
US12148629B2Nov 19, 2024
Shutter disk
APPLIED MATERIALS INC0 citations62
US11913107B2Feb 27, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations62
US11862480B2Jan 2, 2024
Shutter disk
APPLIED MATERIALS INC0 citations62
USD971167SNov 29, 2022
Lower shield for a substrate processing chamber
APPLIED MATERIALS INC0 citations62
US11670513B2Jun 6, 2023
Apparatus and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC0 citations60
US10950475B1Mar 16, 2021
Method and apparatus for processing a substrate using non-contact temperature measurement
APPLIED MATERIALS INC0 citations60
US11629409B2Apr 18, 2023
Inline microwave batch degas chamber
APPLIED MATERIALS INC0 citations59
US11610807B2Mar 21, 2023
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC0 citations59
US11569122B2Jan 31, 2023
Methods and apparatus for cleaving of semiconductor substrates
APPLIED MATERIALS INC0 citations59
US11289357B2Mar 29, 2022
Methods and apparatus for high voltage electrostatic chuck protection
APPLIED MATERIALS INC0 citations59
US11171017B2Nov 9, 2021
Shutter disk
APPLIED MATERIALS INC0 citations59
US11114288B2Sep 7, 2021
Physical vapor deposition apparatus
APPLIED MATERIALS INC0 citations59
US11881385B2Jan 23, 2024
Methods and apparatus for reducing defects in preclean chambers
APPLIED MATERIALS INC0 citations58
US12100577B2Sep 24, 2024
High conductance inner shield for process chamber
APPLIED MATERIALS INC0 citations51
US10677830B2Jun 9, 2020
Methods and apparatus for detecting microwave fields in a cavity
APPLIED MATERIALS INC0 citations51
US10115573B2Oct 30, 2018
Apparatus for high compressive stress film deposition to improve kit life
APPLIED MATERIALS INC0 citations51
US9960023B2May 1, 2018
Methods and apparatus for nodule control in a titanium-tungsten target
APPLIED MATERIALS INC0 citations51
US12080522B2Sep 3, 2024
Preclean chamber upper shield with showerhead
APPLIED MATERIALS INC0 citations50
US12048948B2Jul 30, 2024
Methods for forming microwave tunable composited thin-film dielectric layer
APPLIED MATERIALS INC0 citations50
US11375584B2Jun 28, 2022
Methods and apparatus for processing a substrate using microwave energy
APPLIED MATERIALS INC0 citations49