Inventor
OKAYAMA NOBUYUKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “OKAYAMA NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6733620B1May 11, 2004
Process apparatus
TOKYO ELECTRON LTD134 citations97
US6334983B1Jan 1, 2002
Processing system
TOKYO ELECTRON LTD52 citations95
US5772833AJun 30, 1998
Plasma etching apparatus
TOKYO ELECTRON LTD57 citations94
US7658816B2Feb 9, 2010
Focus ring and plasma processing apparatus
TOKYO ELECTRON LTD36 citations91
US7067178B2Jun 27, 2006
Substrate table, production method therefor and plasma treating device
TOKYO ELECTRON LTD20 citations90
US9466468B2Oct 11, 2016
Shower head, plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD8 citations80
USRE40046EFeb 12, 2008
Processing system
TOKYO ELECTRON LTD8 citations73
USRE39969EJan 1, 2008
Processing system
TOKYO ELECTRON LTD7 citations73
USRE39939EDec 18, 2007
Processing system
TOKYO ELECTRON LTD7 citations73
US10896842B2Jan 19, 2021
Manufacturing method of sample table
TOKYO ELECTRON LTD2 citations70
US7544393B2Jun 9, 2009
Substrate table, production method therefor and plasma treating device
TOKYO ELECTRON LTD2 citations60