USRE40046EExpiredUtility

Processing system

46
Assignee: TOKYO ELECTRON LTDPriority: Apr 11, 1997Filed: Apr 8, 1998Granted: Feb 12, 2008
Est. expiryApr 11, 2017(expired)· nominal 20-yr term from priority
Inventors:Nobuyuki OkayamaHidehito SaegusaJun OzawaDaisuke HayashiNaoki TakayamaKoichi Kazama
Y10T29/53204Y10T29/49117H01J 37/3244C23C 16/45565Y10T29/49002Y10T29/532H01J 37/32477C23C 16/455C23C 16/5096H10P 50/242
46
PatentIndex Score
8
Cited by
8
References
29
Claims

Abstract

A processing system has an upper electrode with gas discharge holes of a shape corresponding to the external we of insulating members. The insulating members are formed of a poly(ether etherketone) resin, a polyimide resin, a poly(ether imide) resin or the like. Each insulating member has a step at its outer surface and an internal longitudinal through hole tapered to expand toward the processing chamber. The insulating members are pressed in the gas discharge holes to bring the steps into contact with shoulders formed in the sidewalls of the gas discharge holes. A part of each insulating member, as fitted in the gas discharge hole, projects from a surface of the upper electrode that faces a susceptor.

Claims

exact text as granted — not AI-modified
1. A processing system comprising:
 a processing vessel defining an airtight processing chamber;    an upper electrode disposed in an upper region of the processing chamber;    a lower electric disposed below and opposite to the upper electrode in the processing chamber, and    a radio frequency power source connected at least to either the upper or the lower electrode;    wherein the upper electrode includes a side facing into the processing chamber towards the lower electrode, the upper electrode side having a plurality gas discharge holes to supply a predetermined process gas therethrough into the processing chamber,    resin insulating members, each provided with a through hole permitting the process gas to pass through, are fitted from the upper electrode side facing the processing chamber into the gas discharge holes, respectively,    each of the gas discharge holes is provided with a shoulder,    each of the insulating members is provided with a step, and    each of the insulating members are positioned in the gas discharge hole with its step in contact with the shoulder of the gas discharge hole.    
     
     
       2. The processing system according to  claim 1 , wherein the insulating members are fitted in the gas discharge holes of the upper electrode to project into the processing chamber. 
     
     
       3. The processing system according to  claim 1 , wherein each of the insulating members is provided with a flange capable of covering the rim of an end of the gas discharge hole on the side of the processing chamber. 
     
     
       4. The processing system according to  claim 1 , wherein at least part of the sidewall of each of the gas discharge holes between an open end thereof on the side of the processing chamber and the shoulder thereof is finished by a plasma-proofing process, and a part of the sidewall of each gas discharge hole between the shoulder and the open end opening into a gas supply passage is not finished by the plasma-proofing process. 
     
     
       5. The processing system according to  claim 4 , wherein the insulating members are formed of a resin. 
     
     
       6. The processing system according to  claim 1 , wherein each of the insulating members has a length and the length of the insulating members is shorter than that of the gas discharge holes. 
     
     
       7. The processing system according to  claim 1 , wherein at least part of the through hole of each insulating member is substantially tapered so as to expand toward the processing chamber. 
     
     
       8. A processing system comprising:
 a processing vessel defining an airtight processing chamber;    an upper electrode disposed in an upper region of the processing chamber;    a lower electrode disposed below and opposite to the upper electrode in the processing chamber; and    a radio frequency power source connected at least to either the upper or the lower electrode;    wherein the upper electrode has an upper electrode member and a cooling plate disposed on the upper electrode member,    the upper electrode member and the cooling plate are provided with a plurality of gas discharge holes through which a predetermined process gas is supplied into the processing chamber,    resin insulating members, each provided with a through hole permitting the process gas to flow through, are fitted into the gas discharge holes to cover the sidewalls of the gas discharge holes, each of the discharge holes being formed as a through hole passing through the upper electrode member and the cooling plate,    each of the gas discharge holes of the cooling plate is provided with a shoulder,    each of the insulating members is provided with a step, and    the insulating members are positioned in the gas discharge holes with the steps thereof resting on the shoulders of the corresponding gas discharge holes, each of the insulating members is fitted into the cooling plate from an opposite side to the upper electrode member.    
     
     
       9. The processing system according to  claim 8 , wherein at least an end part of the through hole of each insulating member on the side of the processing chamber is substantially tapered to expand toward the processing chamber. 
     
     
       10. A method of manufacturing an electrode unit for use in an airtight processing chamber from an electrode with gas discharge holes having a length, said method comprising the steps of:
   providing resin insulating members that each have a through hole permitting process gas to pass therethrough and a length that is less than the length of the gas discharge holes,        inserting the resin members into the gas discharge holes of the electrode, whereby the gas discharge holes supply a predetermined process gas into the processing chamber, and        pressing the resin members to fit within the gas discharge holes.     
     
     
       11. A method of manufacturing an electrode unit according to  claim 10 , wherein the resin members are pressed into the gas discharge holes so as to project therefrom. 
     
     
       12. A method of manufacturing an electrode unit according to  claim 11 , wherein
   each of the resin members is provided with a flange and wherein,        when each resin member is pressed to fit within a gas discharge hole, the flange covers a rim of an end of such gas discharge hole.     
     
     
       13. A method of manufacturing an electrode unit according to  claim 12 , wherein each of the gas discharge holes of the electrode has different interior diameters. 
     
     
       14. A method of manufacturing an electrode unit according to  claim 13 , wherein the through hole of each of the resin members is substantially tapered. 
     
     
       15. A method of manufacturing an electrode unit according to  claim 11 , wherein each of the gas discharge holes of the electrode has different interior diameters. 
     
     
       16. A method of manufacturing an electrode unit according to  claim 15 , wherein the through hole of each of the resin members is substantially tapered. 
     
     
       17. A method of manufacturing an electrode unit for use in an airtight processing chamber from an electrode with gas discharge holes, said method comprising the steps of:
   providing resin insulating members that each have a through hole permitting process gas to pass therethrough,        inserting the resin members into the gas discharge holes of the electrode, whereby the gas discharge holes supply a predetermined process gas into the processing chamber, and        pressing the resin members into the gas discharge holes so as to project therefrom.     
     
     
       18. A method of manufacturing an electrode unit according to  claim 17 , wherein
   each of the resin members is provided with a flange and wherein,        when each resin member is pressed to fit within a gas discharge hole, the flange covers a rim of an end of such gas discharge hole.     
     
     
       19. A method of manufacturing an electrode unit according to  claim 18 , wherein each of the gas discharge holes of the electrode has different interior diameters. 
     
     
       20. A method of manufacturing an electrode unit according to  claim 19 , wherein the through hole of each of the resin members is substantially tapered. 
     
     
       21. A method of manufacturing an electrode unit according to  claim 17 , wherein each of the gas discharge holes of the electrode has different interior diameters. 
     
     
       22. A method of manufacturing an electrode unit according to  claim 21 , wherein the through hole of each of the resin members is substantially tapered. 
     
     
       23. A method of manufacturing an electrode unit for use in an airtight processing chamber from an electrode with gas discharge holes, each of the gas discharge holes having a shoulder, said method comprising the steps of:
   providing resin insulating members that each have a step and a through hole permitting process gas to pass therethrough,        inserting the resin members into the gas discharge holes of the electrode, whereby the gas discharge holes supply a predetermined process gas into the processing chamber, and        pressing the resin members into the gas discharge holes so that the step of each resin member contacts the shoulder of the gas discharge hole into which it was pressed.     
     
     
       24. A method of manufacturing an electrode unit according to  claim 23 , wherein the resin members are pressed into the gas discharge holes so as to project therefrom. 
     
     
       25. A method of manufacturing an electrode unit according to  claim 24 , wherein
   each of the resin members is provided with a flange and wherein,        when each resin member is pressed to fit within a gas discharge hole, the flange covers a rim of an end of such gas discharge hole.     
     
     
       26. A method of manufacturing an electrode unit according to  claim 25 , wherein each of the gas discharge holes of the electrode has different interior diameters. 
     
     
       27. A method of manufacturing an electrode unit according to  claim 26 , wherein the through hole of each of the resin members is substantially tapered. 
     
     
       28. A method of manufacturing an electrode unit according to  claim 24 , wherein each of the gas discharge holes of the electrode has different interior diameters. 
     
     
       29. A method of manufacturing an electrode unit according to  claim 28 , wherein the through hole of each of the resin members is substantially tapered.

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